为了提高压电微位移平台快速定位的精确度, 建立了一种表征压电微位移平台驱动电压与输出位移关系的定位模型。考虑压电工作台在快速、大行程精确定位过程中会受压电陶瓷迟滞特性及本身动态特性的影响, 本文采用Bouc-Wen模型描述压电陶瓷迟滞特性, 并结合压电工作台的动态特性进行共同建模, 使模型同时体现压电工作台的动态特性与迟滞特性。为了验证模型的正确性, 搭建了基于压电微位移平台和相关驱动器的实验设备对模型进行了实验验证, 并进行了测控程序的二次开发。研究结果表明, 与单纯的Bouc-Wen模型相比, 提出模型在最大位移输出为40 μm, 输入电压频率为40 Hz时的最大误差由3.04 μm下降到了0.67 μm, 此时最大相对误差为1.68%。得到的结果验证了提出的模型可较好地模拟压电工作台的迟滞特性与动态特性, 大大提高压电微位移平台在快速、大行程定位中的精确度。

To improve the precision of rapid positioning of a piezoelectric positioning stage, a positioning model is established to characterize the relationship between driving voltage and output displacement of the platform. As the piezoelectric positioning stage for precision position in the fast and large stroke is not only affected by the hysteresis characteristics of the piezoelectric ceramics, but by the dynamic characteristics, this paper uses Bouc-Wen model to describe the hysteresis characteristics of piezoelectric ceramics, combines with the dynamic characteristics of the piezoelectric positioning stage to establish model, and lets the model reflect the dynamic characteristics and hysteresis characteristics of the platform. To verify the correctness of the model, the experimental equipment based on the piezoelectric micro displacement platform and the related driver is built, and model is verified by experiments, and a secondary development of monitor-control program is performed.The results show that, compared with the previous Bouc-Wen model,when proposed model in the maximum displacement output is 40 μm and the input voltage frequency is 40 Hz,the maximum error is reduced from 3.04 μm to 0.67 μm and the maximum relative error is 1.68%.The results show that the proposed model can better simulate the hysteresis characteristics and dynamic characteristics of the piezoelectric stage, and greatly improve the accuracy of the piezoelectric micro displacement platform in the fast and large stroke positioning.