太赫兹科学与电子信息学报, 2016, 14 (5): 793, 网络出版: 2016-11-30  

原子制造与原子微系统:A2P与强约束集成微系统技术的结合

Atom assembly and atom microsystem:a blend of A2P and strongly constrained integrated microsystem
李沫 1,2李倩 2,3张健 2,3
作者单位
1 中国工程物理研究院微系统与太赫兹研究中心,四川 成都 610200
2 电子工程研究所,四川 绵阳 621999
3 中国工程物理研究院 微系统与太赫兹研究中心,四川 成都 610200
摘要
介绍了国外从原子到产品(A2P)研究,阐述了强约束集成微系统技术的微观架构及其两“微”内涵。在此基础上,将A2P 与强约束集成微系统理念相结合,提出了原子制造和原子微系统概念,并初步分析了其科学技术框架体系。我们认为,原子制造和原子微系统技术是从“材料到系统”的集成微系统技术向原子层次的进一步延伸和发展,主要包含如下内涵:a) 研究如何开发先进工艺,跨越原子尺度到宏观尺度的制造鸿沟,使得从原子出发集成定制的宏观尺度产品或系统能够保持优良的“原子级”特性;b) 研究原子层级微观特性在向宏观产品传递过程中的变化的物理过程,讨论如何实现原子层次优良特性的选择性保留以及新特性开发,进而实现系统更强功能及更高性能。原子制造和原子微系统技术具有很强的前沿性、颠覆性,有望为后摩尔定律时代提供一条全新的技术途径,引发一场新的重大技术革命。
Abstract
Researches about Atoms to Product(A2P) are firstly introduced. Then the connotation of Strongly Constrained Integrated Microsystem(SCIMS) and its micro architecture are demonstrated. A new concept named atom assembly and atom microsystem is proposed based on these ideals, by blending the technological ideas of A2P and SCIMS. Its science & technology framework are analyzed preliminarily. It is believed that, atom assembly and atom microsystem is a further development and expansion deep into atom scale of SCIMS. It contains following principles and goals: first, to develop the technologies and processes to assemble nanoscale(atom scale) constituents into materials, components and systems that preserve distinctive nanoscale properties; second, to study the vanishing physical process of nanoscale properties when nanoscale constituents are manufactured at larger “product-scale” dimensions, and to exploit unique nanoscale characteristics which may benefit for “product-scale” systems with higher performance. The concept of atom assembly and atom microsystem is very frontier, challenging and subversive, which may provide a feasible approach for post Moore’s Law era and trigger a technological revolution.

李沫, 李倩, 张健. 原子制造与原子微系统:A2P与强约束集成微系统技术的结合[J]. 太赫兹科学与电子信息学报, 2016, 14(5): 793. LI Mo, LI Qian, ZHANG Jian. Atom assembly and atom microsystem:a blend of A2P and strongly constrained integrated microsystem[J]. Journal of terahertz science and electronic information technology, 2016, 14(5): 793.

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