为了实现对光栅表面缺陷的自动检测，开发了一种基于机器视觉的光栅表面缺陷检测系统。首先，搭建了系统硬件平台，分析并解决了关键检测难点；然后，在分析比较了几种传统边缘检测算法的基础上，介绍了边缘重绘算法，对光栅表面图像进行边缘检测；最后，根据各种光栅表面缺陷特征，选取多个阈值定义多种光栅表面缺陷，提取特征缺陷并标记，开发了检测算法。实验结果表明：该系统检测精度达微米级，单个光栅检测效率为30 s 左右，缺陷识别率在94%以上，误检率在4%以下，可在线实时检测多种光栅表面缺陷。

In order to realize the automatic detection of the grating surface defect, a grating surface defect detection system based on machine vision is developed. First, the hardware platform of the system is built, so that key detection difficulties are analyzed and solved. Then, on the basis of the analysis and comparison of several traditional edge detection algorithms, the edge drawing detection algorithm is introduced to detect the grating surface image. Finally, according to the characteristics of the surface defects of various gratings, a number of threshold values are selected to define the surface defects of a variety of gratings and defects were extracted and labeled, and the detection algorithm is developed. Experimental results indicate that the detection accuracy of the system reaching micron level can detect the surface defects of many kinds of gratings in real time, with the detection efficiency up to 30 seconds, the recognition rate more than 94% and the mistake examining rate lower than 4%.