针对片上光互连用光源对谐振腔单色性、可调性的要求, 基于互补金属氧化物半导体技术和绝缘衬底上的硅材料, 设计并制作了一种基于微环谐振腔的可调谐硅基反射腔镜。利用转移矩阵方法分析了该反射腔的性能, 发现该反射腔具有较好的尖锐度和消光比。实验结果表明, 该反射腔在波长1549 nm处反射率可达90%, 品质因素Q值为3×104, 自由光谱范围(FSR)为9.6 nm。通过对微环谐振腔进行热光调制, 在0~40.5 mW功率范围内实现了在FSR内的波长可调。

Considering the requirement of monochromaticity and tunubility for resonator used in on-chip optical interconnect source, we design and make a tunable silicon reflection cavity mirror based on microring resonator, using complementary metal-oxide-semiconductor technology and silicon material-on insulating substrate. The performance of the reflection cavity is analyzed by the transfer-matrix method, and we find that the reflection cavity shows good properties in sharpness and extinction ratio. The experimental results show that the reflectivity of the reflection cavity can reach 90% at the wavelength of 1549 nm, the quality factor is 3×104, and the free spectral range (FSR) is 9.6 nm. By applying the thermo-optic modulation to the microring resonator, the wavelength tunability in FSR can be realized within the power range of 0-40.5 mW.