针对目前光波导封装使用的精密定位平台行程小, 结构与控制系统复杂的问题, 提出了非共振型压电电机驱动的大行程精密旋转定位平台。该平台通过压电电机的连续作动和步进作动两种工作模式来满足大行程和高精度要求。首先对该精密旋转定位平台进行动力学建模, 确定了系统运动方程。然后, 分析其作动机理, 研究影响旋转平台转速的不同因素。最后, 实验研究该精密旋转定位平台的速度、步距、分辨率与负载特性, 确定平台连续作动与步进作动的驱动方式。实验结果表明, 在直流偏置为60 V, 峰峰电压为120 V, 频率为180 Hz的正弦波电压激励下, 该精密旋转定位平台最大转速可达47 963.2 μrad/s, 分辨率和最大负载分别为3 μrad和60 g。与现有的大行程精密定位旋转平台相比, 设计的平台具有行程大, 精度高, 结构简单, 稳定可控, 且装配调试方便, 易于批量化生产等优势。

A precision rotary positioner with a large stroke driven by the non-resonant piezoelectric motor was proposed to solve the problem of short stoke, complicated structure and control of the precision positioner in optical waveguide packaging. The precision rotary positioner could meet the needs of large stroke and high precision by two driving modes of continuous actuating and stepping actuating. Firstly, the dynamic model of the rotary positioner was established and the kinematics formula of system was presented. Then, the principle of movement was analyzed and the impact factors of rotate speed were researched. Finally, the characters of rotate speed, step displacement, resolution and load were tested, and driving modes of continuous actuating and stepping actuating were discussed. The experimental results indicate that the top speed of precision rotary positioner reaches about 47 963.2 μrad/s at the driving sinusoidal voltage in a peak-peak value of 120 V, an offset of 60 V and a frequency of 180 Hz. Moreover, the rotary resolution of precision rotary positioner is about 3 μrad and the maximum load is 60 g. This precision rotary positioner has characteristics of large stroke, high precision, simple structure, stable controllability and fast response. As compared with the existing precision rotary positioner, the new one presented in the paper has more larger stroke, higher precision, simpler structure and is more convenient to be assembled, adjusted, and produced in batch.