提出并研制了一种基于蓝宝石晶片的光纤法布里-珀罗(法珀)高温传感器.该传感器采用斜端面蓝宝石光纤作传输波导, 蓝宝石晶片作法珀干涉仪, “陶瓷插芯-陶瓷套管”结构做为传感器的固定结构.通过傅里叶变换-最小均方差联合算法解调传感器的反射光谱, 实现了20℃～1 000℃范围内的温度测量, 测试准确度为±2.5℃.该传感器具有体积小、成本低、制作简单以及重复性高的优点, 可用于高温环境下稳定、精确的温度测量.

A fiber-optic Fabry-Perot (F-P) high-temperature sensor based on sapphire wafer was proposed and fabricated. The sensor uses the sapphire fiber with angled end face as a transmission waveguide, the sapphire wafer as a Fabry-Perot (F-P) interferometer and the structure of “Zirconia ferrule-Zirconia tube”as the fixing structure of the sensor. The reflection spectrum of the interferometer was demodulated by performing a combined algorithm of fast Fourier transform algorithm and minimum mean square error estimation.Temperature ranged from 20℃ to 1000℃ is measured, and the obtained precision is ±2.5℃. The sensor has the advantages of small size, low cost, simple fabrication and high repeatability. It can be applied for stable and accurate temperature measurement in high temperature environments.