激光打孔是激光在工业中最重要的应用, 是目前加工小孔中不可缺少的一种激光加工方法。为了实现精密打孔, 设计了五轴激光加工机床、外部光路系统、功率监测系统和CCD视觉系统, 并深入研究了对激光打孔入口孔形和出口孔形、锥度、重熔层等有很大影响的激光偏振态及打孔方式, 确定了利用径向波片进行偏振控制, 旋转打孔作为打孔方式的光路系统。在系统中利用皮秒紫外激光实现了锥度可控、圆度高、侧壁光滑的精密打孔, 并且通过工艺实验验证, 证明了上述设计方法的优越性。

Laser drilling is the most important application in industry, is an indispensable laser processing method for current machining little holes. For precision drilling, a five axis laser processing machine with external optical system, power monitoring system and CCD visual system is designed. The laser polarization and drilling hole method which has a great influence on the shape of the laser drilling entrance and export hole, the taper and the recast layer are researched, in the end determines the use of radial wave plate for polarization control, trepanning drilling way of drilling optical system, using picosecond UV laser has realized the taper control, high roundness, wall smooth precision drilling, and through the process experiment, proved the superiority of the design.