微纳光子结构研究随着光子学、 半导体物理学及微加工技术的发展而逐渐蓬勃开展, 并在其结构、 理论、 制备技术等方面取得了系列进展。 受限于目前的微加工技术水平, 要成功制备大尺度、 高质量的光子材料仍然存在着一定挑战。 激光全息光刻技术作为一种简便快捷的微结构制作技术已经发展成为一种经济快速制作大面积微纳超材料及光子晶体模板的重要手段。 介绍了激光全息光刻技术的原理, 详细阐述了该技术在制作三维面心立方、 木堆积结构、 金刚石结构光子晶体以及光学周期类准晶、 手性超材料、 周期性缺陷结构等微纳光子结构中的应用研究进展。 激光全息光刻技术成功制作微纳光子结构为光子材料在更多领域的广泛应用提供了基础和方法。

Micro-nano photonic structures are developing vigorously based on the progress of photonics, semiconductor physics and microfabrication technology. A series of results are achieved in structure characterization, theory, and fabrication of them. Most high quality photonic structures are man-made ones; however, there are still some challenges in fabricating artificial large-area and high-quality photon materials. With the advantages of photonic structure processing technology, holographic lithography, a low-cost, time-saving and high-efficiency microfabrication method, performs superior application potentials in making metamaterials as well as photonic crystal templates. In this article, we introduced the principles of holographic lithography and described the applications in fabricating various micro-nano photonic structures, such as three dimensional face-center-cubic, wood-pile, diamond-like photonic crystals, as well as quasi-crystalline structure, chiral metamaterials and periodic defect-mode structures. Moreover, the applications of some structures in solar cell and optical fiber sensing are discussed. The success of fabricating micro-nano photonic structures by holographic lithography would pave the way for more applications of these structures in wide fields.