中国激光, 2017, 44 (1): 0102002, 网络出版: 2017-01-10
飞秒激光直写制备内嵌微透镜、能源器件及生物传感器的研究进展 
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Research Progress in Fabrication of Embedded Microball Lenses, Energy Devices and Biosensors by Femtosecond Laser Direct Writing
激光制造 激光直写 飞秒激光 微透镜 超级电容器 柔性传感器 laser manufacturing laser direct writing femtosecond laser microball lenses supercapacitors flexible sensors
摘要
飞秒激光具有超短脉宽和极高峰值强度, 已广泛应用于精细加工与微纳制造领域。目前, 激光直写技术用于柔性器件的制备受到极大的关注。综述了激光直写技术的四个研究方向：1)激光直写微透镜用于广角成像; 2)激光制备纳米金/还原氧化石墨烯微超级电容器; 3)聚酰亚胺基体上多层超级电容器的制备; 4)电容生物传感器的激光制备。同时介绍了本课题组开展的相关研究工作, 可为激光直写制备微纳结构器件的研究与应用及未来发展方向提供参考。
Abstract
Femtosecond laser has been widely used in elaborate processing and micro/nano manufacturing field due to its ultrashort pulse width and extremely high peak intensity. At present, the fabrication of flexible devices by laser direct writing has attracted much attention. The following four research directions based on laser direct writing technology are reviewed: 1) laser direct writing microball lens for wide angle imaging; 2) laser fabrication of Au/reduced graphene oxide micro supercapacitor; 3) preparation of multilayer supercapacitor on polyimide substrate; 4) laser fabrication of capacitive biosensor. Relevant research work of our group is introduced at the same time. This paper provides a reference for the research, application and future direction of the micro/nano device fabrication by laser direct writing.
周伟平, 王树同, 于泳超, 郑崇, 李若舟, 侯婷琇, 白石, 马德龙, 冯国英, 胡安明. 飞秒激光直写制备内嵌微透镜、能源器件及生物传感器的研究进展[J]. 中国激光, 2017, 44(1): 0102002. Zhou Weiping, Wang Shutong, Yu Yongchao, Zheng Chong, Li Ruozhou, Hou Tingxiu, Bai Shi, Ma Delong, Feng Guoying, Hu Anming. Research Progress in Fabrication of Embedded Microball Lenses, Energy Devices and Biosensors by Femtosecond Laser Direct Writing[J]. Chinese Journal of Lasers, 2017, 44(1): 0102002.
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