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飞秒激光诱导金属银纳米布线加工精度的研究

Processing Precision of Femtosecond Laser Induced Silver Nanowiring

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摘要

对飞秒激光诱导银纳米布线的加工精度进行研究,并将其应用于微纳器件的加工领域。对飞秒激光与银离子前驱体溶液的相互作用进行了实验, 通过对飞秒激光功率、曝光时间、前驱体溶液中表面活性剂种类以及浓度的调控, 利用扫描电子显微镜对布线结构进行表征, 得到140 nm宽的银纳米线。利用飞秒激光制备出一组银微纳图案和微型催化反应器。该研究为银微纳结构图案制备以及复杂衬底上金属功能器件集成提供了新的技术。

Abstract

We carried out a research on the precision of femtosecond laser induced silver nanowiring and its application in micro-device integration. The precision of the silver nanowires could be controlled by the laser power, exposure duration, surfactant type and their concentrations in the precursor solution. An experiment of interaction between femtosecond laser and Ag precursor solution was conducted. Experimental results show that silver nanowires with high precision (140 nm) could be prepared, which was confirmed by means of scanning electron microscope. Meanwhile, a micro-pattern of silver nanowires and a micro-catalytic-reactor were produced by femtosecond laser direct writing technique. The research may open up a new way to the designable patterning of silver microstructures toward flexible fabrication and integration of silver functional devices.

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中图分类号:TN249

DOI:10.3788/cjl201744.0102007

所属栏目:“超快激光加工与微纳制造”专题

基金项目:国家自然科学基金(61522503, 61376123)

收稿日期:2016-08-04

修改稿日期:2016-09-05

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作者单位    点击查看

柳森:吉林大学电子科学与工程学院, 吉林 长春 130012
王欢:吉林大学电子科学与工程学院, 吉林 长春 130012
张永来:吉林大学电子科学与工程学院, 吉林 长春 130012

联系人作者:柳森(liusen343056178@sohu.com)

备注:柳森(1992-), 男, 硕士研究生, 主要从事飞秒激光加工方面的研究。

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引用该论文

Liu Sen,Wang Huan,Zhang Yonglai. Processing Precision of Femtosecond Laser Induced Silver Nanowiring[J]. Chinese Journal of Lasers, 2017, 44(1): 0102007

柳森,王欢,张永来. 飞秒激光诱导金属银纳米布线加工精度的研究[J]. 中国激光, 2017, 44(1): 0102007

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