中国激光, 2017, 44 (1): 0104004, 网络出版: 2017-01-10  

扫描曝光系统中二维工作台x轴测量镜的面形在线检测 下载: 670次

Profile Online Detection for Two-Dimensional Stage x Axis Mirror in Scanning Exposure Systems
作者单位
1 中国科学院大学大珩学院, 北京 100049
2 中国科学院长春光学精密机械与物理研究所国家光栅制造与应用工程技术研究中心, 吉林 长春 130033
摘要
为了提高二维工作台的定位精度, 提出了一种在线检测二维工作台x轴测量镜面形的方法。无需y轴测量镜, 利用三路激光干涉仪检测工作台x轴测量镜的二次微分信息, 对所得数据进行二次积分得到工作台测量镜的精确面形。分析了零点误差对工作台测量镜面形误差检测的影响, 并提出了相应的校正方案。对所提出的方法进行了理论推导和实验验证, 结果表明, 所提方法的检测重复精度优于2.6521 nm, 验证了该方法对工作台测量镜面形误差检测的正确性, 并且可对工作台x轴测量镜的面形误差进行实时补偿。
Abstract
To improve the location accuracy of two-dimensional stage, a profile online detection method for two-dimensional stage x axis mirror is proposed. Without the y axis mirror, the quadratic differential information of the stage x axis mirror is detected by the three-path laser interferometer. The quadratic integral is conducted for the obtained data to obtain the accurate profile of stage mirror. The influence of zero error on the profile deviation detection for stage mirror is analyzed and a corresponding calibration scheme is proposed. Theoretical analysis and experimental verification are conducted for the proposed method. The results show that the accuracy of detection repeatability is better than 2.6521 nm by the proposed method, the correctness of the profile deviation detection for stage mirror is verified, and the real-time compensation for the profile deviation of the stage x axis mirror is achieved.

刘兆武, 李文昊, 巴音贺希格, 宋莹, 姜珊, 李晓天, 吕强. 扫描曝光系统中二维工作台x轴测量镜的面形在线检测[J]. 中国激光, 2017, 44(1): 0104004. Liu Zhaowu, Li Wenhao, Bayanheshig, Song Ying, Jiang Shan, Li Xiaotian, Lü Qiang. Profile Online Detection for Two-Dimensional Stage x Axis Mirror in Scanning Exposure Systems[J]. Chinese Journal of Lasers, 2017, 44(1): 0104004.

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