中国激光, 2017, 44 (1): 0103001, 网络出版: 2017-01-10   

近场显微成像法识别高功率激光镜片薄膜内部缺陷 下载: 991次

Identifying Defects in Thin Film of High Power Laser Lens by Using Near Field Microimaging Method
作者单位
1 贵州大学贵州省光电子技术及应用重点实验室, 贵州 贵阳 550025
2 贵州大学大数据与信息工程学院, 贵州 贵阳 550025
摘要
采用近场显微成像法测量了高功率激光镜片薄膜表面裂纹和内部节瘤缺陷,并分析了它们的形成机制。100 nm孔径的圆锥形针尖辐射的倏逝波与薄膜中预埋的缺陷相互作用, 将倏逝波转化为辐射波后, 由物镜收集并在远场逐点成像,同步地获得薄膜表面的原子力显微镜(AFM)图像和扫描近场光学显微镜(SNOM)图像, 以便直观地识别缺陷产生的物理机制。结果表明:在倏逝波的有效作用区域内, 薄膜表面裂纹与内部节瘤可以同时精确地被识别。通过对比SNOM与AFM结果, 发现基底表面裂纹在镀膜过程中积累了残余应力, 这导致薄膜的表面呈层状断裂, 其单条最小裂纹横向剖面尺寸为165 nm, 超过了传统远场检测的实验检测精度; 此外, SNOM图中的亮斑表明, 薄膜的内部有高于基底折射率的节瘤存在。
Abstract
The surface flaws and internal knots in a film of high power laser lens are experimentally measured by using a near field micro-image method, and their formation mechanisms are analyzed as well. The evanescent waves radiated by a conic tip at a 100 nm diameter interact with the defects embedded in the films. After the evanescent waves are converted into radiation waves, they are collected by the objective lens and imaged point by point in the far field. Atomic force microscopy (AFM) images and scanning near-field optical microscopy (SNOM) images on the surface of the thin film are obtained synchronously, so as to visually identify the physical mechanisms of the defects formation. The results show that the surface flaw and the internal knot in thin film are accurately identified at the same time in effective interacting areas of evanescent wave. By comparing AFM result with SNOM result, we find that the surface flaw of substrate accumulates the residual stress in the processing of coating, which results in a layered cracking on the surface of film. The crosswise profile scale of single minimum flaw is 165 nm, which is beyond experimental detection precision of traditional far field detection. In addition, the high hot spot in SNOM graph shows that refractive index of knots exist in the thin film is higher than that in substrate.

白忠臣, 黄兆岭, 郝礼才, 陆安江, 秦水介. 近场显微成像法识别高功率激光镜片薄膜内部缺陷[J]. 中国激光, 2017, 44(1): 0103001. Bai Zhongchen, Huang Zhaoling, Hao Licai, Lu Anjiang, Qin Shuijie. Identifying Defects in Thin Film of High Power Laser Lens by Using Near Field Microimaging Method[J]. Chinese Journal of Lasers, 2017, 44(1): 0103001.

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