利用有限元分析软件数值模拟了固体激光器系统中由单晶硅(Silicon)、石英(Silica)与超低膨胀玻璃(ULE)等不同材料制作的变形反射镜受激光辐照下的热畸变特性。计算结果表明: 当入射激光功率密度为 0.225 kW/cm2, 激光照射时间为 10 s, 镜面反射率为 99.9%时, 三种材料的变形镜的最大温升分别为0.804、6.751与7.122 ℃, 最大热变形分别为0.049 3、0.034 8与0.005 4 ?滋m, 相比之下, 单晶硅温升较小, 超低膨胀玻璃(ULE)的变形与应力最小, ULE是未来比较理想的镜面材料。最后, 对变形镜在长脉冲激光辐照下也进行了计算与分析。

The thermal distortions of deformable mirror with such materials as mono-crystalline silicon, silica and nucleated glass(ULE), irradiated with diode-pumped solid-state laser(DPL) were calculated and analyzed using FEA software. The results show that when the power density of input laser is 0.225 kW/cm2, and the reflectivity of the deformable mirror thin film are 99.9%, the temperature rising and thermal distortions of the deformable mirror are separately 0.804, 6.751 and 7.122 ℃, and 0.049 3, 0.034 8 and 0.005 4 ?滋m respectivel, under the radiation time of 10 seconds. By comparison, the temperature rising of deformable mirror with mono-crystalline silicon substrate is smaller; the deformation and stress of ULE is the lowest, which would be a kind of more promising material for producing deformable mirror in future DPL laser system. In the end, some results of the long pulse laser irradiation were calculated and analysis.