红外与激光工程, 2016, 45 (11): 1118006, 网络出版: 2017-01-20
离轴三反系统计算机辅助装调
Computer aided alignment for off-axis TMA system
计算机辅助装调 离轴三反系统 失调特性 Zernike多项式 computer aided alignment off-axis TMA system misalignment characteristics Zernike polynomial coefficient
摘要
为实现对离轴三反系统快速、有效的装调, 提出了一种离轴三反系统计算机辅助装调(CAA)方法。该方法在理论分析失调后离轴三反系统像差特性的基础上, 结合CAA技术及光学装调的实际情况, 选择出最少且最合理的调整量; 根据检测数据及CAA数学模型直接计算出调整量的大小及方向。采用该方法对一离轴三反系统进行实际装调, 将调整量从11个减少到7个, 利用波前传感器被动式检测方法对离轴三反系统0及±1视场像质进行检测, 通过一次计算调整快速使该系统全视场波像差从RMS≤0.32λ减少至RMS≤0.067λ(λ=632.8 nm), 结果表明该装调方法简单、有效。
Abstract
To realize the fast, efficient alignment of off-axis three-mirror anastigmatic(TMA) system, a computer aided alignment(CAA) method was proposed. First, the aberration characteristics in the misaligned off-axis TMA system was theoretically analyzed to determine the evaluation parameters in CAA. Second, the key alignment parameters to be adjusted were given by combining the misalignment characteristics with the actual situation of the optical assembly. Finally, the magnitudes and orientation of the alignment parameters were calculated with the measurement data and CAA model. In order to verify the method, an off-axis TMA system was aligned according to this CAA method. The wave-front error (WFE) of the center and extreme edge FOVs were measured by wave-front sensor. After only once calculation and alignment, the measured root mean square (RMS) WFEs were reduced from 0.32λ to 0.067λ(λ=632.8 nm). The experiment results demonstrate that this CAA method is feasible.
王彬, 伍凡, 叶玉堂. 离轴三反系统计算机辅助装调[J]. 红外与激光工程, 2016, 45(11): 1118006. Wang Bin, Wu Fan, Ye Yutang. Computer aided alignment for off-axis TMA system[J]. Infrared and Laser Engineering, 2016, 45(11): 1118006.