We present compact silicon-arrayed waveguide grating routers (AWGRs) with three different channel spacings of 20, 6.4, and 3.2 nm for optical interconnect systems. The AWGR with the 20 nm channel spacing shows a low loss of 2.5 dB and a low crosstalk of 20 dB and has a footprint of only 0.27 mm×0.19 mm. The AWGR with the channel spacing of 6.4 nm has loss ranging from 3 to 8 dB, and the crosstalk is 18 dB. As for the 3.2 nm channel spacing, the loss is about 4 dB, and the crosstalk is 12 dB.