为了研究微磨削参数对斜面光纤透镜平面度的影响, 减小微磨削方法加工斜面光纤透镜的平面度误差, 采用正交试验法对直径Ф125 μm单模光纤的30°斜面光纤透镜的微磨削进行了试验。结合微磨削的磨削力模型和材料力学弹性梁变形理论, 分析微磨削过程中随着磨削用量的变化所导致的光纤透镜被磨削斜面的平面度的变化规律。 理论分析和实验结果表明: 光纤悬伸长度对斜面光纤透镜平面度的影响最大, 增大光纤悬伸长度将导致较大的斜面光纤透镜平面度的轮廓误差, 恰当的磨削用量组合能够获得较小的平面轮廓误差。通过试验磨削出了平面度误差为3 μm的30°斜面光纤透镜。

In order to study effects of micro-grinding parameters on flatness of optical fiber lens and reduce flatness error of optical fiber lens in micro-grinding, a group of orthogonal experiments of micro-grinding 30° oblique fiber lens on a single fiber with 125 μm diameter are carried out in this paper. Based on grinding forces model of micro-grinding and elastic beam deformation theory of material mechanics, effect rule of micro-grinding parameters on flatness of optical fiber lens is analyzed. Theoretical analysis and experimental results show that overhang length of optical fiber has the greatest influence on flatness of oblique optical fiber lens, while increasing overhang length of optical fiber will result in a larger flatness error of oblique optical fiber lens and appropriate micro-grinding parameters can obtain smaller flatness error of oblique optical fiber lens. Appropriate micro-grinding experiment results in 30° oblique fiber lens with flatness 3 μm.