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全息光栅拼接系统中的像差补偿法

Compensational Method for Aberration in Mosaic System of Holographic Grating

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摘要

全息光栅拼接参数需要用参考干涉条纹来检测。系统像差会造成干涉条纹扭曲, 产生光栅拼接误差。为补偿像差造成的光栅拼接误差, 对像差与干涉条纹扭曲量之间的理论关系进行了研究, 利用计算机模拟了参考干涉条纹图像, 并将光栅拼接误差预调制到参考干涉条纹图像中。为验证该方法的有效性, 在曝光系统像差峰-峰值为0.72λ的情况下进行了光栅拼接实验, 在光栅拼缝处像差造成-1级衍射波面最大突变量为0.36λ。利用预制参考干涉条纹图像作为拼接参考时, 其最大突变量为0.097λ。实验结果表明, 在曝光系统像差较大的情况下, 干涉条纹预制法能够有效地控制光栅拼接误差。

Abstract

The reference interference fringe is used to detect the parameters of the holographic grating. The distortion of the interference fringes is caused by the system aberration, and the grating tiling-error is generated. In order to compensate the grating tiling-error, the relationship between the aberration and the distortion of interference fringe is studied. The reference interference fringes are simulated by computer, and the grating tiling-error is per-modulated into the interference fringe image. To verify the effectiveness of the proposed method, the grating splicing experiment is carried out under the condition of system aberration whose peak to peak value is 0.72λ. The maximum variation of the -1st diffraction wave front at the grating seam is 0.36λ. When the prefabricated reference interference fringe images are used as the reference, and the maximum variation is 0.097λ. The experimental results show that the modulated interference fringes can effectively control the tiling-error of the grating in the exposure system with large aberration.

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中图分类号:O436

DOI:10.3788/aos201737.0305001

所属栏目:衍射与光栅

基金项目:国家自然科学基金(61178046)、江苏省高校自然科学研究重大项目(11KJA14001)

收稿日期:2016-09-09

修改稿日期:2016-10-27

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作者单位    点击查看

钱国林:苏州市职业大学电子信息工程学院, 江苏 苏州 215104
吴建宏:苏州大学物理与光电能源学部, 苏州纳米科技协同创新中心, 江苏 苏州 215006
李朝明:苏州大学物理与光电能源学部, 苏州纳米科技协同创新中心, 江苏 苏州 215006
陈新荣:苏州大学物理与光电能源学部, 苏州纳米科技协同创新中心, 江苏 苏州 215006

联系人作者:钱国林(qgl_jy@jssvc.edu.cn)

备注:钱国林(1980-), 男, 博士, 讲师, 主要从事光信息器件与微纳制造方面的研究。

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引用该论文

Qian Guolin,Wu Jianhong,Li Chaoming,Chen Xinrong. Compensational Method for Aberration in Mosaic System of Holographic Grating[J]. Acta Optica Sinica, 2017, 37(3): 0305001

钱国林,吴建宏,李朝明,陈新荣. 全息光栅拼接系统中的像差补偿法[J]. 光学学报, 2017, 37(3): 0305001

被引情况

【1】张森,张军伟,周忆,王逍,邓波,粟敬钦,胡东霞. 波前畸变对光栅压缩器输出激光脉冲的时空特性影响. 中国激光, 2018, 45(4): 401011--1

【2】 张文涛, 杨越越, 张玉婷, 吴萍, 熊显名, 杜浩. 基于干涉法的反射式光栅旋转角度检测方法. 激光与光电子学进展, 2019, 56(11): 110501--1

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