为了实现新型红外陶瓷ALON高陡度薄壁保形非球面的超精密磨削加工, 首先根据ALON的材料属性和高陡度薄壁保形非球面的结构特性, 进行了其超精密磨削加工工艺性分析, 并基于有限元计算方法, 完成了面向ALON高陡度薄壁保形非球面的精密夹具的设计以及关键参数的优化。然后完成了ALON的超精密磨削工艺实验, 工艺实验结果表明减小工件转速和砂轮粒度都会降低ALON的平均表面粗糙度Ra值, 但砂轮粒度对磨削后ALON的表面粗糙度影响更显著。最后实现了ALON高陡度薄壁保形非球面的超精密磨削加工, 磨削后的ALON高陡度薄壁保形非球面的面形精度PV值为2 μm, 表面粗糙度Ra值可达8.6 nm。

In order to realize the ultra-precision grinding of high-gradient thin conformal aspheric on ALON infrared ceramic, the material property of ALON and the structured feature of high-gradient thin conformal aspheric was analyzed firstly. The precision jig was design and the main dimensions were optimized by finite element method. Secondly, the ALON grinding experiments were implemented. The results indicated that although the roughness would reduce with the decrease of workpiece spindle speed and wheel abrasive size, the effect of abrasive size on roughness was more significant. Finally, the ultra-precision grinding procedures were established for ALON high-gradient thin conformal aspheric. The form accuracy PV value of ground ALON workpiece was 2 μm, while the surface roughness was 8.6 nm.