针对微颗粒空间装配的问题, 以外径为十几微米的微颗粒与外径为几百微米的柱腔装配为研究对象, 开展微颗粒空间跨尺度装配方法研究。首先, 针对微颗粒受到基底表面作用力影响不易被拾取与释放的问题, 分析了微颗粒的受力情况, 设计了真空吸附式微夹持器用于微颗粒的拾取与释放; 然后, 针对由于微颗粒与柱腔的尺寸跨度大, 很难实现装配过程中二者空间位置实时监测的问题, 设计了具有多维视觉监测功能的微装配机器人并且建立了多维视觉监测模型, 实现微颗粒与柱腔装配过程的在线监测; 最后, 提出了基于多维视觉监测模型的微颗粒与柱腔空间半自动装配方法。实验结果证明了所提方法的有效性, 并且实现了将外径为20 μm的微颗粒放入外径为200 μm的柱腔内的目标。该方法适用于微机电系统制造中微颗粒的三维空间装配。

For 3D space assembly of micro-particles, the column cavity assembly of micro-particles with diameter of more than a dozen microns and cavities with diameter of several hundred microns was determined as the research object, and a trans-scale assembly method research of micro-particles in 3D space was developed. Firstly, for the problem that micro-particles are hard to be gripped and released because of micro-force from substrate, the micro-force of micro-particles was analyzed, and a micro-gripper based on theory of vacuum adsorption was designed to grip and release micro-particles. Secondly, for the large-span of size between micro particles and column cavities, its very difficult to realize monitoring of the real-time positions of micro-particles and cavities in assembly process, then a micro-robot system with multi-dimensional visual monitor function was designed and a multi-dimensional visual monitor model was set up to realize on-line monitoring of assembly process of micro-particles and cavities. Lastly, a semi-automatic assembly method of micro-particles and cavities based on multi-dimensional visual monitor model was proposed. Experimental result proves the effectiveness of proposed method, and the aim of putting a micro-particle with diameter of 20 μm into a column cavity with diameter of 200 μm is realized. This method applies to 3D space assembly of micro-particles in micro-electrical-mechanical (MEMS) system fabrication.