为了研发紧凑型的射频波导CO2激光器并探究影响其输出性能的因素, 采用平行平面腔内电极结构, 设计并研制了一台射频激励矩形波导CO2激光器。实验中采用透过率为20%的输出镜, 在工作气压14kPa下, 得到12W的最大激光输出功率, 电光转换效率达到9.4%。结果表明, 工作气压和射频输入功率是影响激光输出性能的最主要因素。该研究取得了预期的实验结果, 对国内今后此类器件的研究具有很好的借鉴意义。

In order to research and develop compact radio frequency(RF)-excited waveguide laser and study the factors affecting laser output performance, a compact RF-excited rectangle waveguide CO2 laser was designed and developed by using parallel plane resonator and inner electrode structure. Output mirror of transmissivity 20% was used in the experiment. Under the gas pressure of 14kPa, laser power is up to 12W and the optimal electron-photon conversion efficiency reaches 9.4%. The results show that gas pressure and input power are the main factors affecting laser output performance. The experimental results achieve the expected experimental results and provide technical references for the development of this type of appliance.