Collection Of theses on high power laser and plasma physics, 2013, 11 (1): 6162, Published Online: Jun. 2, 2017  

Ptycholographic iterative engine with self-positioned

Author Affiliations
Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
Abstract
A special optical alignment is adopted and corresponding reconstruction algorithm is developed to reduce the reconstruction error induced by the hysteresis or backlash error of the translation stage in Ptychographical Iterative Engine (PIE) imaging with weak scattering specimen. In this suggested method, the positions of the scanning probe are determined directly from the recorded diffraction patterns rather than from the readout of the stage meter. This method not only remarkably improves the reconstruction quality, but also completely lowers the dependency of PIE on the device accuracy and accordingly enhances its feasibility for many applications with weak scattering specimen.

Xinchen Pan, Cheng Liu, Qiang Lin, Jianqiang Zhu. Ptycholographic iterative engine with self-positioned[J]. Collection Of theses on high power laser and plasma physics, 2013, 11(1): 6162.

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