Collection Of theses on high power laser and plasma physics, 2012, 10 (1): 1393, Published Online: Jun. 2, 2017
Integrated interferometer for monitoring three-dimensional vibrations by discrete aperture
Vibration measurement Vibration measurement Interferometer Interferometer Three-dimension Three-dimension
Abstract
This paper presents a new method for measuring vibration based on interference from twospherical waves. By integrating the two interference arms into a beamsplitter cube by reflectivefilm and dividing the probe beam into two parts with discrete apertures, the interferometer candistinguish that the vibrations are from the monitored optical components or from laser interferometer systemitself. At the same time, because the two interference waves are spherical, it can realize monitoringthe three-dimensional vibrations. The measurement system has advantages of being stable andreliable with an integrated structure. Theoretical analysis and experimental demonstration are performed.The experiment results indicate that the method can monitor three-dimensional vibrationsaccurately.
Xuejie Zhang, Wei Huang, Dean Liu, Tao Feng, Yan Zhang, Pingping Sun, Jianqiang Zhu. Integrated interferometer for monitoring three-dimensional vibrations by discrete aperture[J]. Collection Of theses on high power laser and plasma physics, 2012, 10(1): 1393.