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Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing

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Abstract

There exist some shallow scratch defects on the super-smooth optical surface. Their detection has a low efficiency with the existing technologies. So a new detection method, dark-field detection of adaptive smoothing and morphological differencing (DFD-ASMD), is proposed. On one hand, the information of shallow scratches can be kept in dark-field images. On the other hand, their weak characteristics can be separated and protected from being overly reduced during the elimination of noise and background in the image. Experiments show the detection rate of shallow scratches is around 82%, and DFD-ASMD can lay a foundation for quality control of defects on the high-quality optical surface.<录用日期>2017-05-18<上网时间>2017-06-13

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DOI:10.3788/col201715.081202

所属栏目:Instrumentation, measurement, and metrology

基金项目:This work was supported by the National Natural Science Foundation of China (Nos. 61627825 and 11275172) and the State Key Laboratory of Modern Optical Instrumentation Innovation Program (MOI) (No. MOI2015 B06).

收稿日期:2016-12-09

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Chen Li:State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
Yongying Yang:State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
Huiting Chai:State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
Yihui Zhang:State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
Fan Wu:State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
Lin Zhou:State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
Kai Yan:State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
Jian Bai:State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
Yibing Shen:State Key Laboratory of Modern Optical Instrumentation, College of Optical Science and Engineering, Zhejiang University, Hangzhou 310027, China
Qiao Xu:Research Center of Laser Fusion, CAEP, Mianyang 621900, China
Hongzhen Jiang:Research Center of Laser Fusion, CAEP, Mianyang 621900, China
Xu Liu:Research Center of Laser Fusion, CAEP, Mianyang 621900, China

联系人作者:chuyyy@zju.edu.cn;

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引用该论文

Chen Li, Yongying Yang, Huiting Chai, Yihui Zhang, Fan Wu, Lin Zhou, Kai Yan, Jian Bai, Yibing Shen, Qiao Xu, Hongzhen Jiang, Xu Liu, "Dark-field detection method of shallow scratches on the super-smooth optical surface based on the technology of adaptive smoothing and morphological differencing," Chinese Optics Letters 15(8), 081202 (2017)

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