红外与激光工程, 2017, 46 (3): 0302001, 网络出版: 2017-06-27   

光学显微三维测量解耦合准则

3D measurement decoupling criterion in optical microscopy
作者单位
哈尔滨工业大学 超精密光电仪器工程研究所, 黑龙江 哈尔滨 150080
摘要
光学显微三维测量耦合效应是指沟槽或台阶样品高度测量准确性受横向周期影响产生原理误差的现象。采用卷积不相关原则和有限能量损失原则, 分别建立了薄样品和深沟槽样品光学显微三维测量的解耦合模型, 揭示了被测样品特征参数与光学仪器表征能力之间的关联关系。与现有W/3准则相比, 光学显微三维测量解耦合准则能够客观反映光学仪器表征能力受样品结构差异变化的影响, 指示高度测量解耦合评定的示值区域, 预见高度测量原理误差产生, 为沟槽或台阶样品三维结构表征提供了一种新的计量评定准则。
Abstract
The coupling effect in three dimensional measurements using optical microscopy refers to the phenomenon that the accuracy of the measurement height of a groove or step sample that suffers a principle error caused by the influence of the relatively small transverse period of the sample. Based on the convolution irrelevance principle and the limited energy lost principle, two models depicting the coupling effects in measurements of the thin step samples and the deep groove samples were established respectively, thus the coupling relationship between the geometric parameters of the sample and the measurement capability of the optical instrument were revealed. Compared with the existing W/3 reading rule, this criterion can more objectively reflect the different influences of samples with different structures on the actual measurement capability of the optical instrument, and indicate the assessment portions for height measurements without accuracy loss, also is able to predict the generation of principle error in height assessment if the structure is too tight or deep, thus provides a new reading and evaluation criterion for the three dimensional measurement of a groove or step sample.

刘俭, 谷康, 李梦周, 谭久彬. 光学显微三维测量解耦合准则[J]. 红外与激光工程, 2017, 46(3): 0302001. Liu Jian, Gu Kang, Li Mengzhou, Tan Jiubin. 3D measurement decoupling criterion in optical microscopy[J]. Infrared and Laser Engineering, 2017, 46(3): 0302001.

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