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基于柔性铰链结构的高灵敏度低频光纤光栅加速度传感器

High sensitivity and low-frequency FBG acceleration sensors based on flexure hinge structure

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摘要

设计了一种基于柔性铰链结构的光纤光栅加速度传感器, 进行了结构理论分析, 并构建有限元模型仿真分析了传感器的加速度传感特性。基于F-P滤波器构建了具有温度自补偿功能的光纤光栅加速度检测系统, 并通过增加反馈控制电路, 对F-P滤波器进行反馈控制, 实现了系统的零点自温度补偿。对系统的特性进行了实验测试, 结果表明: 系统对加速度的连续激励信号和冲击激励信号均有良好的动态响应, 系统的固有频率为380.0 Hz, 动态响应范围可达65.6 dB, 频率响应范围为10.0 ~240.0 Hz, 灵敏度为236 pm/g, 所设计的加速度传感器具有较强的横向抗扰能力, 干扰方向灵敏度仅为工作方向灵敏度的3.5%。

Abstract

A fiber grating acceleration sensor based on flexure hinge structure was designed. The structure theory analysis was carried out and the finite element model was built to simulate and analyze the acceleration sensing characteristic of the sensor. A fiber Bragg grating(FBG) acceleration detection system with temperature self-compensation was designed based on F-P filter, which achieved zero temperature self-compensation by adding a feedback circuit to control F-P filter. The characteristics of the system were tested on the built system. The results indicate that the system has excellent response to impulse excitation signal and continuous acceleration excitation signal. Natural frequency of the system is 380.0 Hz, while the dynamic range reaching 65.6 dB. The frequency response range of the system is 10.0 -240.0 Hz, in which the acceleration sensitivity is 236 pm/g. Since the sensitivity in the interference direction is only 3.5% of the sensitivity in the working direction, the acceleration sensor is designed with strong lateral immunity.

Newport宣传-MKS新实验室计划
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中图分类号:TN247

DOI:10.3788/irla201746.0317004

所属栏目:光电测量

基金项目:国家自然科学基金(61074163); 山东省自然科学基金(ZR2014FM025); 山东大学基本科研业务费资助(2016JC012)

收稿日期:2016-07-10

修改稿日期:2016-08-20

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张法业:山东大学 控制科学与工程学院, 山东 济南 250061
姜明顺:山东大学 控制科学与工程学院, 山东 济南 250061
隋青美:山东大学 控制科学与工程学院, 山东 济南 250061
张 雷:山东大学 控制科学与工程学院, 山东 济南 250061
曹玉强:山东大学 控制科学与工程学院, 山东 济南 250061
马国文:国网山东安丘市供电公司, 山东 潍坊262100
魏钧涛:山东大学 控制科学与工程学院, 山东 济南 250061

联系人作者:张法业(zhangfaye@sdu.edu.cn)

备注:张法业(1984-), 男, 工程师, 博士生, 主要从事光纤传感技术、光电子技术和信号处理方面的研究。

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引用该论文

Zhang Faye,Jiang Mingshun,Sui Qingmei,Zhang Lei,Cao Yuqiang,Ma Guowen,Wei Juntao. High sensitivity and low-frequency FBG acceleration sensors based on flexure hinge structure[J]. Infrared and Laser Engineering, 2017, 46(3): 0317004

张法业,姜明顺,隋青美,张 雷,曹玉强,马国文,魏钧涛. 基于柔性铰链结构的高灵敏度低频光纤光栅加速度传感器[J]. 红外与激光工程, 2017, 46(3): 0317004

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