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采用马赫-曾德尔干涉法测量单晶硅在线应力损伤

Measurement of real-time stress damage of monocrystal silicon by Mach-Zehnder interferometry

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摘要

开展了毫秒脉冲激光辐照单晶硅的实验研究, 基于马赫-曾德尔干涉技术测量了毫秒脉冲激光与单晶硅相互作用过程中的在线应力损伤。用COMSOL Multiphysics有限元仿真软件建立了毫秒脉冲激光辐照单晶硅的数值仿真模型。从理论和实验两方面探讨了毫秒脉冲激光与单晶硅作用时, 相同脉宽不同能量密度下应力场随时间的演变规律。进一步研究了干涉条纹的处理方法, 基于传统x轴投影法提出了用45°投影法来计算材料各方向上的应变, 并对两种处理方法得到的实验结果进行了对比。结果显示: 与仿真结果相比, x轴投影法实验结果的误差为9.5%~29.3%, 而45°投影法实验结果的误差为0.1%~22.6%, 表明用马赫-曾德尔干涉法测量激光辐照单晶硅产生的在线应力损伤时, 采用45°投影法计算材料各方向上的应变结果更为准确。该实验和计算方法为单晶硅在线应力损伤的研究提供了理论和实验上的指导。

Abstract

An experiment of ms laser pulse irradiation on monocrystal silicon was performed. The real-time stress damage from the interaction between ms laser pulse with monocrystal silicon was measured by Mach-Zehnder interferometry. A digital simulation model for ms laser pulse irradiation on monocrystal silicon was established by COMSOL Multiphysics finite element method. The evolution law of a stress field with time under the same pulse width and different energy densities was explored when the monocrystal silicon was irradiated by ms laser pulse from theory and experiments. The processing method for interference fringes was researched and the 45°projection method was proposed to calculate the stress values of materials in different directions based on the traditional x axis projection method. Based on the numerical simulation results, the experimental results of the two methods were compared and analyzed. It shows that the error from the experimental results of the x axis projection method is in 9.5%—29.3% and that from the 45°projection method is in 0.1%—22.6% as compared with that of numerical simulation results. It is verified that the method of 45°projection is more accurate for the processing of interference fringes in the experiment of measuring the real-time stress damage by the Mach-Zehnder. The experimental results provide the theoretical and experimental guidance for the study of the stress damage of monocrystal silicon.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:O436.1;TN 241

DOI:10.3788/ope.20172505.1395

所属栏目:信息科学

基金项目:吉林省固体激光技术与应用重点实验室基金资助项目(No.20150622011JC)

收稿日期:2016-09-20

修改稿日期:2016-10-18

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吴春婷:长春理工大学 理学院, 吉林 长春 130022
李 贺:长春理工大学 理学院, 吉林 长春 130022
蔡继兴:长春理工大学 理学院, 吉林 长春 130022
谭 勇:长春理工大学 理学院, 吉林 长春 130022
金光勇:长春理工大学 理学院, 吉林 长春 130022

联系人作者:吴春婷(bigsnow1@163.com)

备注:吴春婷, 女, 副教授, 激光物理与新型激光器, 激光与物质相互作用。

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引用该论文

WU Chun-ting,LI He,CAI Ji-xing,TAN Yong,JIN Guang-yong. Measurement of real-time stress damage of monocrystal silicon by Mach-Zehnder interferometry[J]. Optics and Precision Engineering, 2017, 25(5): 1395-1401

吴春婷,李 贺,蔡继兴,谭 勇,金光勇. 采用马赫-曾德尔干涉法测量单晶硅在线应力损伤[J]. 光学 精密工程, 2017, 25(5): 1395-1401

被引情况

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【2】王 驰,旷 滨,孙建美,朱 俊,毕书博,蔡 楹,于瀛洁. 超小自聚焦光纤探头的研究进展. 中国光学, 2018, 11(6): 875-888

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