激光与光电子学进展, 2017, 54 (7): 070002, 网络出版: 2017-07-05
AlN陶瓷激光金属化的研究进展 下载: 1118次
Research Progress on Laser Metallization of AlN Ceramic
摘要
介绍了氮化铝(AlN)陶瓷激光金属化的进展和金属化过程中的问题以及主要解决方法。激光金属化利用激光的热效应使AlN表面发生热分解,直接生成金属导电层,该方法具有成本低、效率高、设备维护简单等优点。进一步介绍了激光器、光束质量、工艺参数等的优化方法以及AlN陶瓷金属化的应用,并对AlN陶瓷激光金属化在未来的发展进行了展望。
Abstract
The progress on laser metallization of aluminium nitride (AlN) ceramics and the problems in the process of metallization are introduced. The major solutions to these problems are proposed as well. Based on the laser thermal effect, the thermal decomposition occurs on the AlN surface by laser metallization, and the metal conductive layer is generated directly, which has the advantages of low cost, high efficiency, simple equipment maintenance and so on. The optimization methods of laser, beam quality and process parameters and the applications of AlN ceramic metallization are introduced. The development of AlN ceramic metallization in the future is prospected.
黄平奖, 王晓峰, 李琦, 张紫辰, 潘岭峰. AlN陶瓷激光金属化的研究进展[J]. 激光与光电子学进展, 2017, 54(7): 070002. Huang Pingjiang, Wang Xiaofeng, Li Qi, Zhang Zichen, Pan Lingfeng. Research Progress on Laser Metallization of AlN Ceramic[J]. Laser & Optoelectronics Progress, 2017, 54(7): 070002.