为了抑制电激励准分子激光系统产生的强电磁干扰, 采用电磁辐射理论分析了准分子激光器电磁辐射机理, 确定了激光器辐射干扰源主要来源于激光器的主放电回路、出光口和氢闸流管; 采用近场探头分别对各关键部位不同距离电磁辐射进行了测试; 结合测试结果与电磁屏蔽原理对激光器电磁辐射进行了屏蔽设计和屏蔽效能测试, 针对准分子激光系统, 提出了抑制电磁干扰的几种措施。结果表明, 设计的屏蔽盒的屏蔽效能达到40dB; 引入电磁干扰抑制措施后, 准分子激光系统能稳定可靠工作。该研究满足了工程实际要求。

In order to prevent the strong electromagnetic interference produced by an electric excitation excimer laser system, the electromagnetic radiation mechanism of excimer laser was analyzed according to the principle of electromagnetic radiation and the main radiation sources were determined, i.e., the main discharge circuit, the light outlet and hydrogen thyratron. The key parts were tested by using a near-field probe respectively. Electromagnetic shielding design was implemented and shielding effectiveness was tested by combining the test results with the principle of electromagnetic shielding. And then, other several measures was also put forward to restrain electromagnetic interference in view of the excimer laser system. The results show that the effectiveness of the shielding box can reach 40dB and the excimer laser system is stable and reliable after the introduction of electromagnetic interference suppression measures. This study satisfies the practical requirement in engineering.