红外与激光工程, 2017, 46 (7): 0718006, 网络出版: 2017-09-21   

近红外大数值孔径平场显微物镜设计

Design of high NA flat-field microscope objective for near infrared
作者单位
北京理工大学 光电学院 光电成像技术与系统教育部重点实验室, 北京 100081
摘要
为满足飞秒激光微纳加工系统对高加工精度和大加工范围的需求, 首先确定了该系统的重要组成部分-无限共轭距显微物镜所需具备的特性及设计指标。依据薄透镜组的初级像差理论, 针对飞秒激光波长推导出光学系统为校正匹兹凡场曲和二级光谱所需满足的条件。该镜头由11片球面透镜构成, 所选用材料皆为国产玻璃, 同时避免三胶合结构的使用。设计了一套工作波长为785~815 nm, 数值孔径为0.9, 像方视场为22.5 mm, 放大倍率为40×的近红外平场复消色差显微物镜。设计结果表明: 该镜头的MTF良好, 全视场波像差均小于0.08λ, 各种几何像差均远小于公差且满足平场和复消色差条件, 能量集中度高。使用补偿器放松材料公差、加工公差和装调公差, 公差分配后全视场RMS波像差小于0.09λ, 满足实际应用要求。
Abstract
To meet the requirements of femtosecond laser micro-nanofabrication systems for high precision and wide region, the features and design specifications of infinity microscope objectives which were important components of the systems were determined. Based on the theory of primary aberration of thin lens system, the conditions to meet were concluded to correct Petzval curvature and second order spectrum for femtosecond wavelength. The objective consisted of 11 spherical lens, and all materials were glass made in China, and the use of cemented lens composed of three lens was avoided. A near infrared flat-field microscope objective, whose working wavelength was 785-815 nm, numerical aperture was 0.9, field of view in image space was 22.5 mm, magnification was 40×, was designed. Designing results show that the objective has excellent MTF, RMS wavefront errors of all fields are less than 0.08λ, and various geometrical aberrations are deeply under tolerances, the results meet the conditions of flat field and apochromatism, and energy concentration is high. Compensators are used to slacken material tolerance, manufacturing tolerances and alignment tolerances. RMS wavefront errors of all fields get less than 0.09λ after tolerances attribution and the objective can be applied actually.

周恩源, 刘丽辉, 刘岩, 曹振. 近红外大数值孔径平场显微物镜设计[J]. 红外与激光工程, 2017, 46(7): 0718006. Zhou Enyuan, Liu Lihui, Liu Yan, Cao Zhen. Design of high NA flat-field microscope objective for near infrared[J]. Infrared and Laser Engineering, 2017, 46(7): 0718006.

本文已被 3 篇论文引用
被引统计数据来源于中国光学期刊网
引用该论文: TXT   |   EndNote

相关论文

加载中...

关于本站 Cookie 的使用提示

中国光学期刊网使用基于 cookie 的技术来更好地为您提供各项服务,点击此处了解我们的隐私策略。 如您需继续使用本网站,请您授权我们使用本地 cookie 来保存部分信息。
全站搜索
您最值得信赖的光电行业旗舰网络服务平台!