为了实现滑块内滚道型面精度的快速准确测量,提出一种基于激光三角位移传感器倾斜测量的方法。对该方法的算法进行推理与验证,同时借助高精度圆棒进行实验验证。根据测量系统的特征与滑块内滚道的形状,建立相对应的模型。设计相应的算法,计算滑块内滚道的半径,并对测量过程中的误差来源进行标定补偿。在内滚道轮廓算法的基础上,计算滑块内滚道的轴线相对基准面的位置与平行度。介绍该方案的验证性实验并分析结果。实验结果表明:标准圆棒的测量精度为3.75 μm,标准差在2 μm以内。实验结果满足5 μm的测量精度要求,且该测量方式对标定件与待测件没有位姿要求,具备一定的推广性。

In order to realize accurate and fast measurement of the inner raceway surface accuracy of a slide block, a method of tilt measurement based on laser triangulation displacement sensor is proposed. The method is reasoned and verified, and the experiment is carried out by means of high precision round bar. According to the characteristics of measuring system and shape of inner raceway of the slider, the corresponding model is established. Relevant algorithm is used to calculate the radius of inner raceway of the slider, and the error source in the measurement process is calibrated and compensated. Then, on the basis of inner raceway contour algorithm, parallelism and position of the axis of slider internal raceway relative to the base plane are calculated. Finally, verification test of this scheme is introduced and the results are analyzed. The test results show that the measurement accuracy of the standard round bar is 3.75 μm and the standard deviation is less than 2 μm. The test results meet the requirements of measurement accuracy of 5 μm. Moreover, the measurement method does not have pose requirements for reference piece and part to be tested, so it has certain generalization performance.