碲锌镉晶体（CdZnTe）是一种性能优异的红外焦平面探测器衬底材料，其质量的优劣将直接影响外延层的结构与性能，而晶体中的微观缺陷常常是影响衬底材料质量的主要因素之一。本文采用红外透射显微镜、金相显微镜、X 射线形貌仪、扫描电镜、白光干涉仪等仪器系统地检测和研究了碲锌镉晶体中存在的微观缺陷。研究发现碲锌镉晶体样品中主要存在层错、孪晶界和包裹物等微观缺陷，结合晶体缺陷理论详细地分析了碲锌镉晶体中微观缺陷的形成机制。

Cadmium zinc telluride crystals (CdZnTe) are widely used as promising substrates for growing epitaxial layers of infrared focal plane detector arrays. The structure and performance of these layers depend on the quality of the CdZnTe substrate. Microdefects in the CdZnTe crystals are thus important factors that affect the quality of the substrate material. In this paper, the defects in CdZnTe samples are studied using infrared transmission microscopy, metallographic microscopy, X-ray topography, scanning electron microscopy(SEM) with EDAX energy spectroscopy, and white interferometry. It found that stacking faults, inclusions, and twinning are present in the CdZnTe crystals. The formation mechanisms of the CdZnTe crystals are analyzed in detail, according to the crystal defect theory.