介绍了位置敏感传感器（Position Sensitive Detector,PSD）的基本原理及特性,设计了一种基于一维PSD探测器的位移测量系统。针对PSD只与光的能量重心有关、光敏面无死区、可连续测量光斑位置的应用特点,设计了PSD后续的信号处理电路及上位机显示系统。单片机（MCU）通过ADS7825UB采集PSD输出的位置信息,经过处理后由USB接口传给上位机,上位机控制面板可控制数据采集,并进行位移值显示,从而完成对位移的测量。实验结果表明,测量分辨率可达0.1 μm,测量误差在±6 μm内,可在位移测量领域推广使用。

The basic principle and characteristics of position sensitive detector (PSD) are introduced, and a displacement measurement system based on one - dimensional PSD detector is designed. For the PSD only relates to the center of gravity of the light, there is no dead zone in the photosensitive surface, and the application of the spot position can be continuously measured. The PSD signal processing circuit and the PC display system are designed. Then the measurement of displacement is completed. The experimental results show that the measurement resolution is up to 1 μm and the measurement accuracy is up to ± 2%, which can be used in displacement measurement.