基于严格耦合波分析法分析了亚波长光栅波前调控的方法, 设计了具有凸透镜、锥透镜和闪耀光栅功能的三种亚波长光栅结构, 以平面方式制备了具有聚焦和闪耀效果的三种微纳结构波前调控器. 计算了不同光栅厚度、光栅齿和光栅槽宽度下的光栅透射率, 通过选择合适光栅参数组合, 得到三种波前调控器透射率均在97%以上.硅基平面结构与常规结构器件性能相比, 平面和常规透镜、锥透镜在聚焦效果上, 焦斑的半高全宽近似相等, 峰值强度提高了1.64和2.35倍; 平面相对常规闪耀光栅的峰值强度提高了3.77倍.

Based on the rigorous coupled wave analysis method, the subwavelength grating wavefront control method was analyzed, three subwavelength grating structures with the function of convex lens, cone lens and blazed grating were designed. These devices achieve good focus and blazing effect. By calculating the grating transmittance at different grating thickness, grating teeth and grating groove width, the transmittances of the three wavefront manipulation devices are all above 97% after selecting the combination of suitable grating parameters. Compared the performance of silicon-based planar structural devices with conventional structural devices, the lens and the cone lens of the planar structure, the Full Width at High Maximum of the focal spot is approximately equal to that of the conventional lens and cone lens, but the peak intensity is increased to 1.64 and 2.35 times. The peak intensity of the planar relative to the conventional blazed grating is increased to 3.77 times.