红外技术, 2017, 39 (9): 785, 网络出版: 2017-12-04
高性能17 μm非制冷氧化钒红外焦平面探测器的研制
Development of High-Performance 17 μm Uncooled VOx Infrared Focal Plane Array
摘要
研制出一款640×512 高性能17 μm 非制冷氧化钒红外焦平面探测器。读出电路输入级采用镜像电路获得盲像元(Rd)和感光像元(Rs)电流差的积分电流(Iint),并能够有效抑制输入偏压噪声;同时采用逐行积分、逐列读出模式。氧化钒采用单层微桥工艺;像元桥臂间距缩至0.8 μm,以尽可能增大桥面及VOx 面积,有效提高像元响应率。器件采用高可靠性的金属真空封装。测试结果表明,器件的噪声等效温差(NETD)小于45 mK,响应率大于15 mV/K,热响应时间小于10 ms。
Abstract
A 640×512 high-performance 17 μm uncooled VOx infrared focal plane detector is developed. A readout integrated circuit (ROIC) in the input stage uses mirror circuits to obtain the difference between the currents flowing through the blind pixel (Rd) and photosensitive pixels (Rs), which is the integrating current (Iint), and can effectively reduce the noise contribution of input bias voltages; furthermore, the ROIC adopts a rolling-shutter mode for integration and a pixel-by-pixel mode for readout. In order to increase the responsivity and decrease the negative electron-transfer dissociation (NETD), the pixel bridge arm spacing is reduced to 0.8 μm and the sensitive area of VOx is maximized. The device uses a high-reliability metal vacuum package. The experimental results show that the NETD of the device is less than 45 mK, the corresponding responsivity is greater than 15 mV/K, and the thermal time constant is less than 10 ms.
李煜, 方辉, 谭果, 李军利, 郭健海, 史晔, 何熙, 冯涛, 张海军. 高性能17 μm非制冷氧化钒红外焦平面探测器的研制[J]. 红外技术, 2017, 39(9): 785. LI Yu, FANG Hui, TAN Guo, LI Junli, GUO Jianhai, SHI Ye, HE Xi, FENG Tao, ZHANG Haijun. Development of High-Performance 17 μm Uncooled VOx Infrared Focal Plane Array[J]. Infrared Technology, 2017, 39(9): 785.