光子学报, 2017, 46 (11): 1123001, 网络出版: 2017-12-08  

基于太阳模拟器阶梯式补偿滤光片的研究

Research on Ladder-type Compensation Filter Based on Solar Simulator
作者单位
长春理工大学 光电工程学院, 吉林 长春 130022
摘要
太阳模拟器是利用人工光源模拟太阳光辐照的设备, 滤光片作为太阳模拟器中的重要元件, 对其光谱精度要求也越来越高.本文通过建立数学模型, 引入新的评价函数, 设计了0.4~1.1 μm波段五个不同分光要求的阶梯式补偿滤光膜.并在薄膜制备过程中, 应用最小二乘法原理对实验数据进行拟合, 找到了残余蒸镀量与膜层厚度之间的关系, 解决了残余蒸镀对薄膜的光谱影响, 最终制备出的薄膜符合使用要求.
Abstract
The solar simulator is a device that uses artificial light to simulate sunlight, as an important component of the solar simulator, the accuracy of the filter spectral requirements are getting higher and higher. In this paper, a step compensation filter with five different spectral requirements in the 0.4~1.1 μm band is designed by establishing a mathematical model and introducing a new evaluation function. In the process of film preparation, the least squares method was used to fit the experimental data, and the relationship between the residual deposition amount and the thickness of the film was found, which solves the spectral effect of the residual deposition on the film, and the film finally meets the requirements.

付秀华, 杨金也, 刘冬梅, 张静, 郭凯. 基于太阳模拟器阶梯式补偿滤光片的研究[J]. 光子学报, 2017, 46(11): 1123001. FU Xiu-hua, YANG Jin-ye, LIU Dong-mei, ZHANG Jing, GUO Kai. Research on Ladder-type Compensation Filter Based on Solar Simulator[J]. ACTA PHOTONICA SINICA, 2017, 46(11): 1123001.

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