首页 > 论文 > 激光与光电子学进展 > 54卷 > 12期(pp:121202--1)

残余应力对激光激发超声表面波技术检测二氧化硅体材料杨氏模量的影响

Influence of Residual Stress on Young Modulus Detection of SiO2 Bulk Materials by Laser-Induced Surface Ultrasonic Wave Technique

  • 摘要
  • 论文信息
  • 参考文献
  • 被引情况
  • PDF全文
分享:

摘要

在理想理论模型中引入了包含残余应力的等效弹性常数, 建立了二氧化硅的半无限大残余应力理论计算模型。研究了残余应力对激光激发超声表面波检测二氧化硅体材料杨氏模量的影响, 并提出了误差判断依据。结果表明, 当二氧化硅体材料的残余压应力小于900 MPa时, 相对误差小于5%, 残余应力的影响可以忽略; 当残余压应力大于900 MPa时, 相对误差大于5%, 此时应考虑残余应力的影响。

Abstract

With the introduction of the effective elastic constants including the residual stress in the ideal theoretical model, the half-infinite residual-stress theoretical calculation model of SiO2 is established. The influence of residual stress on the Young modulus detection of SiO2 bulk materials by the laser-induced surface ultrasonic wave technique is studied, and the error judgment basis is proposed. The results show that, when the residual compressive stress of SiO2 bulk materials is less than 900 MPa, the relative error is less than 5% and the influence of residual stress can be ignored. While when the residual compressive stress is more than 900 MPa, the error is more than 5%, and the influence of residual stress should be taken into account.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:TN47

DOI:10.3788/lop54.121202

所属栏目:仪器,测量与计量

基金项目:国家自然科学基金(61571319)

收稿日期:2017-05-25

修改稿日期:2017-06-19

网络出版日期:--

作者单位    点击查看

睢晓乐:天津大学微电子学院, 天津 300072
肖夏:天津大学微电子学院, 天津 300072
戚海洋:天津大学微电子学院, 天津 300072
孔涛:天津大学微电子学院, 天津 300072

联系人作者:肖夏(xiaxiao@tju.edu.cn)

备注:睢晓乐(1992—), 女, 硕士研究生, 主要从事材料残余应力方面的研究。E-mail: suixiaole@outlook.com

【1】Lin K, Yu Y G, Xi J T, et al. A fiber-coupled self-mixing laser diode for the measurement of Young′s modulus[J]. Sensors, 2016, 16(6): 928.

【2】Zhu Qian, Qiu Jinhao, Zhang Chao, et al. Application of laser ultrasonic detection method for double-layer laminated material[J]. Laser & Optoelectronics Progress, 2016, 53(3): 031402.
朱倩, 裘进浩, 张超, 等. 双层层压材料中激光超声检测方法的应用[J]. 激光与光电子学进展, 2016, 53(3): 031402.

【3】Li Zhiguo, Xiao Xia, Zhang Xinhui, et al. Dispersive characteristics of surface acoustic waves for measuring mechanical properties of low-k dielectrics used in ULSI[J]. Chinese Journal of Semiconductors, 2005, 26(10): 2032-2037.
李志国, 肖夏, 张鑫慧, 等. 表征ULSI低介电常数互连材料机械特性的表面波频散特性[J]. 半导体学报, 2005, 26(10): 2032-2037.

【4】Fall D, Compoint F, Duquennoy M, et al. Surface acoustic wave characterization of optical sol-gel thin layers[J]. Ultrasonics, 2016, 68: 102-107.

【5】Zhan Yu, Xue Junchuan, Liu Changsheng. Numerical simulation of laser ultrasonic elastic constant measurement based on Abaqus[J]. Chinese J Lasers, 2015, 42(5): 0508002.
战宇, 薛俊川, 刘常升. 激光超声测量弹性常数的Abaqus数值模拟[J]. 中国激光, 2015, 42(5): 0508002.

【6】Xiao X, Qi H Y, Tao Y, et al. Study on the interfacial adhesion property of low-k, thin film by the surface acoustic waves with cohesive zone model[J]. Applied Surface Science, 2016, 388: 448-454.

【7】Shan X M, Xiao X, Liu Y L. Determination of Young′s modulus and Poisson′s ratio of nanoporous low-k thin film by laser-generated surface acoustic waves[J]. Advanced Science Letters, 2011, 4(3): 1230-1234.

【8】Xiao Xia, Bai Maosen, Li Zhiguo, et al. Signal processing in the LSAWs experiment for determining Young′s modulus of low-k film[J]. Journal of Tianjin University, 2007, 40(5): 554-558.
肖夏, 白茂森, 李志国, 等. LSAWs测量低介电常数介质薄膜杨氏模量的信号处理[J]. 天津大学学报, 2007, 40(5): 554-558.

【9】金宝印. 激光声表面波系统及其在薄膜杨氏模量测量中的应用研究[D]. 天津: 天津大学, 2011: 1-8.

【10】Yang Yongliang, Yue Li, Li Na, et al. Study on the properties of DLC films with Si doping prepared by Rf-PECVD[J]. Laser & Optoelectronics Progress, 2015, 52(1): 013101.
杨永亮, 岳莉, 李娜, 等. Rf-PECVD制备Si掺杂DLC薄膜性能的研究[J]. 激光与光电子学进展, 2015, 52(1): 013101.

【11】贺玲凤. 声弹性技术[M]. 北京: 科学出版社, 2002: 94-109.

【12】Murnaghan F D. Finite deformation of an elastic solid[M]. New York: Wiley, 1951.

【13】Hughes D S, Kelly J L. Second-order elastic deformation of solids[J]. Physical Review, 1953, 92(5): 1145-1149.

【14】Duquennoy M, Ouaftouh M, Ourak M, et al. Influence of natural and initial acoustoelastic coefficients on residual stress evaluation: Theory and experiment[J]. Journal of Applied Physics, 1999, 86(5): 2490-2498.

【15】白茂森. LSAWs技术表征ULSI互连布线Low-k介质薄膜机械特性的研究[D]. 天津: 天津大学, 2007: 6-10.

【16】Duquennoy M, Ouaftouh M, Devos D, et al. Effective elastic constants in acoustoelasticity[J]. Applied Physics Letters, 2008, 92(24): 244105.

【17】Bogardus E H. Third-order elastic constants of Ge, MgO, and fused SiO2[J]. Journal of Applied Physics, 1965, 36(8): 2504-2513.

【18】Leplan H, Geenen B, Robic J Y, et al. Residual stresses in evaporated silicon dioxide thin films: Correlation with deposition parameters and aging behavior[J]. Journal of Applied Physics, 1995, 78(2): 962-968.

【19】Ye Xiaowen, Ding Tao, Cheng Xinbin, et al. Contrastive investigation of the residual stress of SiO2 films prepared by electron beam evaporation in different relative humidity environments[J]. Infrared and Laser Engineering, 2012, 41(3): 713-717.
叶晓雯, 丁涛, 程鑫彬, 等. 电子束蒸发SiO2薄膜残余应力在不同湿度环境下的对比[J]. 红外与激光工程, 2012, 41(3): 713-717.

【20】Shao Shuying, Tian Guanglei, Fan Zhengxiu, et al. Influences of the deposition parameters and aging time on the residual stress of SiO2 films[J]. Acta Optica Sinica, 2005, 25(1): 126-130.
邵淑英, 田光磊, 范正修, 等. 沉积参量及时效时间对SiO2薄膜残余应力的影响[J]. 光学学报, 2005, 25(1): 126-130.

引用该论文

Sui Xiaole,Xiao Xia,Qi Haiyang,Kong Tao. Influence of Residual Stress on Young Modulus Detection of SiO2 Bulk Materials by Laser-Induced Surface Ultrasonic Wave Technique[J]. Laser & Optoelectronics Progress, 2017, 54(12): 121202

睢晓乐,肖夏,戚海洋,孔涛. 残余应力对激光激发超声表面波技术检测二氧化硅体材料杨氏模量的影响[J]. 激光与光电子学进展, 2017, 54(12): 121202

被引情况

【1】杨连杰,李阳,孙俊杰,邹云. 激光超声表面波在表面缺陷上的反射与透射. 激光与光电子学进展, 2019, 56(4): 41203--1

您的浏览器不支持PDF插件,请使用最新的(Chrome/Fire Fox等)浏览器.或者您还可以点击此处下载该论文PDF