光电子技术, 2017, 37 (2): 119, 网络出版: 2017-12-25
高亮单色硅基LED微显示器件的制作
The Fabrication of High Light Monochrome LED Micro-display on Silicon
摘要
基于硅基有源驱动芯片和单色LED显示阵列芯片,利用光刻及沉膜工艺,在芯片上完成了640×480铟柱阵列的制备,之后采用回流焊、倒装焊工艺,实现了驱动芯片和显示芯片的互联。结果表明: 采用倒装焊工艺可以实现硅基LED微显示器件的制作,具有可行性。
Abstract
A 640×480 indium pillar array in the chip was fabricated by using photolithography and coating process. The interconnection between the silicon-based active drive chip and monochrome LED chip was achieved with reflow soldering and flip-chip technology. The proposed silicon-based active drive chip and LED display chip show advanced properties.
杨洪宝, 昌永龙, 王健波, 张白雪. 高亮单色硅基LED微显示器件的制作[J]. 光电子技术, 2017, 37(2): 119. YANG Hongbao, CHANG Yonglong, WAN Jianbo, ZHANG Baixue. The Fabrication of High Light Monochrome LED Micro-display on Silicon[J]. Optoelectronic Technology, 2017, 37(2): 119.
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