红外与激光工程, 2017, 46 (11): 1103003, 网络出版: 2017-12-26  

扫描近场圆偏振光学显微镜

Scanning near-field circular polarization optical microscope
作者单位
上海理工大学 光电信息与计算机工程学院 上海市现代化光学重点实验室, 上海 200093
摘要
提出一种利用镀有金属薄膜的V形无孔光学探针构建的扫描近场光学显微镜, 将圆偏振光注入镀有金属薄膜的V形槽内在针尖处形成近场照射光源, 并利用探针收集样品表面近场光信号。理论分析表明: 探针收集的近场和远场反射光之间存在一定的相位差, 该相位差与探针机械结构、探针与样品的距离有关, 可通过探针与样品之间的距离加以控制, 因此利用偏振性器件可有效抑制远场光强。实验中, 探针与样品之间的距离通过范德华力回馈控制, 探针操作在接触模式, 实验结果显示所测近场与远场光相位相差57°, 近场光学图像横向分辨率优于12 nm。
Abstract
A scanning near-field optical microscope (SNOM) based on an apertureless optical probe was presented. The probe had a V shape hollow on its top and coated with metal film. Illumination near-field light (NFL) will emit from the apex of probe when far-field light (FFL) is focused on the hollow. There is a phase difference between collected NFL and FFL, which relates to the distance between probe and sample. The collected FFL can be eliminated using a Glan-Taylor analyzer according to the phase difference. The experimental results show the phase difference of this system is 57°. The spatial resolution of SNCOM is less than 12 nm.

金涛, 谢孟宇, 冀胡东, 吴丹丹, 郑继红. 扫描近场圆偏振光学显微镜[J]. 红外与激光工程, 2017, 46(11): 1103003. Jin Tao, Xie Mengyu, Ji Hudong, Wu Dandan, Zheng Jihong. Scanning near-field circular polarization optical microscope[J]. Infrared and Laser Engineering, 2017, 46(11): 1103003.

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