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HEMT太赫兹探测器的二维电子气特性分析

2DEG characteristics of HEMT THz detector

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摘要

采用分子束外延技术(MBE)对GaAs/AlxGa1-xAs二维电子气(2DEG)样品进行了制备, 样品制备过程中, 通过改变Al的组分含量、隔离层厚度、对比体掺杂与δ掺杂两种方式, 在300 K条件下对制备的样品进行了霍尔测试, 获得了室温迁移率7.205E3cm2/Vs, 载流子浓度为1.787E12/cm3的GaAs/AlxGa1-xAs二维电子气沟道结构, 并采用Mathematica软件分别计算了不同沟道宽度时300 K、77 K温度下GaAs基HEMT结构的太赫兹探测响应率, 为HEMT场效应管太赫兹探测器的研究和制备提供了参考依据.

Abstract

The 2DEG samples of GaAs/AlxGa1-xAs was prepared by adopting MBE. In the process of sample preparation, by changing the constituent content of Al and the thickness of the isolation layer and comparing the body doping with the delta doping, we perform the Hall test under the condition of 300 K the migration rate of room temperature is 7.205×103 cm2/Vs and the carrier concentration is the open groove structure of 2DEG of GaAs/AlxGa1-xAs, which is 1.787×1012/cm3. Besides, the software of Mathematica is adopted to respectively calculate the THz response rates of GaAs-based HEMT structures with different channel widths under the temperature of 300 K and 77 K, which have provided the references for the research and preparation of HEMT THz detectors.

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中图分类号:TN386;TN405

DOI:10.11972/j.issn.1001-9014.2017.06.025

基金项目:科技部“国家重大科学仪器设备开发专项”基金(2012YQ140005)

收稿日期:2017-06-09

修改稿日期:2017-09-10

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李金伦:中国人民解放军军械工程学院 导弹工程系, 河北 石家庄 050003中国科学院半导体研究所 超晶格实验室, 北京 100083
崔少辉:中国人民解放军军械工程学院 导弹工程系, 河北 石家庄 050003
徐建星:中国科学院半导体研究所 超晶格实验室, 北京 100083中国科学院大学 材料科学与光电技术学院, 北京 100049
袁野:中国科学院半导体研究所 超晶格实验室, 北京 100083中国科学院大学 材料科学与光电技术学院, 北京 100049
苏向斌:中国科学院半导体研究所 超晶格实验室, 北京 100083西北大学 光子学与光子技术研究所, 陕西 西安 710069
倪海桥:中国科学院半导体研究所 超晶格实验室, 北京 100083中国科学院大学 材料科学与光电技术学院, 北京 100049
牛智川:中国科学院半导体研究所 超晶格实验室, 北京 100083中国科学院大学 材料科学与光电技术学院, 北京 100049

联系人作者:李金伦(李金伦(1989-);男; 辽宁沈阳人; 博士研究生.主要研究方向为精密仪器与微系统.)

备注:李金伦(1989-),男, 辽宁沈阳人, 博士研究生.主要研究方向为精密仪器与微系统.

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引用该论文

LI Jin-Lun,CUI Shao-Hui,XU Jian-Xing,YUAN Ye,SU Xiang-Bin,NI Hai-Qiao,NIU Zhi-Chuan. 2DEG characteristics of HEMT THz detector[J]. Journal of Infrared and Millimeter Waves, 2017, 36(6): 790-794

李金伦,崔少辉,徐建星,袁野,苏向斌,倪海桥,牛智川. HEMT太赫兹探测器的二维电子气特性分析[J]. 红外与毫米波学报, 2017, 36(6): 790-794

被引情况

【1】李金伦,崔少辉,张振伟,倪海桥,牛智川. 蝶形天线增强的共振隧穿二极管太赫兹探测器研究. 中国激光, 2018, 45(8): 814002--1

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