现今各个应用领域的器件微型化、功能化和集成化的发展趋势,对微纳加工技术提出了巨大挑战。越来越多器件的核心设计都依赖于高度图案化的三维复杂微纳结构。3D飞秒激光纳米打印(FsLNP)是一种无掩模的、利用飞秒激光直写进行加工的三维增材加工技术。其高度可设计性和远超光学衍射极限的高加工精度能够充分满足复杂技术需求。基于3D飞秒激光纳米打印独特的双光子聚合机制,只要合理设计所需材料的光聚合方案和微纳结构,可以制备一系列效率高且性能优越的微纳器件。简要介绍了3D飞秒激光纳米打印的技术要点、基本原理和目前所涉及的典型应用。

Devices in a diversity of application scopes are now evolving towards miniaturization, functionalization and integration. Finely-patterned 3D micro-nanostructures are in great demand as core components in more and more devices. This keeps challenging the current micro-nanofabrication techniques. 3D femtosecond laser nanoprinting (FsLNP) is an outstanding mask-free three-dimensional additive fabrication technique with both powerful designability and high accuracy far beyond the optical diffraction limit. Based on the unique two-photon photopolymerization mechanism of 3D FsLNP, a series of highly efficient and well-functioned micro-nanodevices can be fabricated when suitable photopolymerization scheme and structure arrangement are given. In this review, we briefly introduce the technical essentials and physical fundamentals of 3D FsLNP, as well as several typical application examples.