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部分补偿数字莫尔移相干涉的回程误差消除

Retrace error elimination for partial compensation digital Moiré phase shifting interferometry

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摘要

为了实现非球面面形误差的高精度测量, 研究了基于部分补偿原理的数字莫尔移相干涉技术中回程误差的消除方法。通过建立实际干涉仪和建模理想干涉仪, 并运用数字莫尔移相干涉技术, 获得实际干涉仪像面与被测非球面面形误差相关的波前; 分析了该测量系统的误差, 提出采用逆向优化法消除大面形误差时的回程误差实现被测非球面的面形误差检测。实验结果表明: 与轮廓仪结果比对, 面形误差较小时二分之一法重构面形误差, 峰谷值和均方根值分别优于λ/20, 面形误差较大时运用逆向优化法消除回程误差, 重构的非球面面形误差峰谷值和均方根值偏差均优于λ/5。基于逆向优化法的部分补偿数字莫尔移相干涉非球面检测, 有效消除了大面形误差时的回程误差, 可实现高精度的面形误差重构检测。

Abstract

A digital Moiré phase-shifting interferometry with partial compensation lens was expounded to test the figure error of aspheric surfaces with high accuracy measurement. The real interferometer and the ideal interferometer model were established to obtain the real and ideal wavefront at the image plane of the interferometer. Then the image wavefront in the real interferometer related to the surface figure error of the aspheric surface under test was obtained by using the digital Moiré phase-shifting technique. The error analysis of this measuring system was presented, and the reverse optimization procedure was applied to eliminate retrace error for the large figure error and reconstruct the test aspheric surface large figure error. Experimental results show that, compared to the profilometer, for the small figure error, the accuracy of the aspheric surface figure error measurement with the one-half method can achieve less than λ/20, both PV error and RMS error. For the large figure error, the reverse optimization method need to be used to obtain the accuracy of aspheric surface errors measurement of less than λ/5, both PV error and RMS error. Partial compensating digital Moiré phase shifting interferometry for the test aspheric surface error based on reverse optimization procedure can effectively correct the retrace error, and reconstruct the large figure error of aspheric surfaces with high-accuracy.

Newport宣传-MKS新实验室计划
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中图分类号:TH744

DOI:10.3788/irla201847.0117005

所属栏目:光电测量

基金项目:国家自然科学基金仪器专项(51327005)

收稿日期:2017-06-04

修改稿日期:2017-08-09

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张丽琼:北京理工大学 光电学院 精密光电测试仪器及技术北京市重点实验室, 北京 100081
王劭溥:北京理工大学 光电学院 精密光电测试仪器及技术北京市重点实验室, 北京 100081
胡摇:北京理工大学 光电学院 精密光电测试仪器及技术北京市重点实验室, 北京 100081
郝群:北京理工大学 光电学院 精密光电测试仪器及技术北京市重点实验室, 北京 100081

联系人作者:张丽琼(zhanglqoe@126.com)

备注:张丽琼(1977-), 女, 讲师, 博士, 主要从事光学精密干涉测量方面的研究。

【1】Zhang Zhao, Sun Jingxu, Liu Zexun, et al. Optical design of THz image surface scanning with an off axis parabolic mirror[J]. Infrared and Laser Engineering, 2016, 45(7): 0703003. (in Chinese)

【2】Li Hang, Yan Changxiang. Design of wide-angle lens for 8 mega-pixel mobile phone camera[J]. Chinese Optics, 2014, 7(3): 456-461. (in Chinese)

【3】Wang Yunqi, Liu Weiqi, Zhang Daliang, et al. Design of off-axis three-mirror optical system with wide field of view based on transfer matrix[J]. Infrared and Laser Engineering, 2016, 45(4): 0418003. (in Chinese)

【4】Shi Tu, Yang Yongying, Zhang Lei, et al. Surface testing methods of aspheric optical elements [J]. Chinese Optics, 2014, 7(1): 26-46. (in Chinese)

【5】Wang Xiaokun. Fabrication and testing of an off-axis aspheric surface with abnormal shape[J]. Infrared and Laser Engineering, 2014, 43(9): 2959-2963. (in Chinese)

【6】Li Ming, Luo Xiao, Xue Donglin, et al. Design of CGH for testing large off-axis asphere by considering mapping distortion[J]. Optics and Precision Engineering, 2015, 23(5): 1246-1253. (in Chinese)

【7】Meng Xiaohui, Wang Yonggang, Li Wenqing, et al. Fabricating and testing of Ф420 mm high-order aspheric lens[J]. Optics and Precision Engineering, 2016, 24(12): 3068-3075. (in Chinese)

【8】Gappinger R O, John E. Greivenkamp.Iterative reverse optimization procedure for calibration of aspheric wave-front measurements on a nonnull interferometer[J]. Appl Opt, 2004, 43(27): 5152-5161.

【9】Sullivan J J . Non-Null interferometer for testing of aspheric surfaces[D]. US: University of Arizona, 2015: 430-457.

【10】Liu Dong, Shi Tu, Zhang Lei, et al. Reverse optimization reconstruction of aspheric figure error in a Non-Null interferometer[J]. Appl Opt, 2014, 53(24): 5538-5546.

【11】Shi Tu, Zang Zhongming, Liu Dong, et al. Retrace error correction for Non-Null tesing of optical aspheric surface[J]. Acta Optica Sinica, 2016, 36(8): 147-157. (in Chinese)

【12】Shen Hua. Research on Key Techniques of Tilted-Wave-Interferometer Used in the Measurement of Freeform Surfaces[M]. Nanjing: Nanjing University of Science & Technology, 2014: 55-74. (in Chinese)

【13】Liu Huilan, Hao Qun, Zhu Qiudong, et al. Testing an aspheric surface using part-compensating lens[J]. Transactions of Beijing Institute of Technology, 2004, 24(7): 625-628. (in Chinese)

【14】Zhu Q, Hao Q. Aspheric surface test by digital Moiré method[C]//SPIE, 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 2007, 6723: 672355.

【15】Hao Q, Hu Y, Zhu Q D. Digital Moiré phase-shifting interferometric technique for aspheric testing[J]. Applied Mechanics & Materials, 2014, 590: 623-628.

引用该论文

Zhang Liqiong,Wang Shaopu,Hu Yao,Hao Qun. Retrace error elimination for partial compensation digital Moiré phase shifting interferometry[J]. Infrared and Laser Engineering, 2018, 47(1): 0117005

张丽琼,王劭溥,胡摇,郝群. 部分补偿数字莫尔移相干涉的回程误差消除[J]. 红外与激光工程, 2018, 47(1): 0117005

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