设计了采用输入波导、缓变展宽波导和宽的直过渡波导的Y型分支波导结构,大大降低了光分路器的插入损耗。 利用OptiBPM软件,将其逐级扩展为1×8平面波导光分路器。分别研究了波导折射率、弧形波导长度、分支角及输入波长对该平面波导光分路器输出特性的影响, 并结合最优结构参数对其进行了优化。仿真结果表明:该光分路器插入损耗、输出均匀性的最佳值分别为9.96 dB、0.41 dB。 器件设计参数及性能可以满足批量生产要求,对光分路器的设计和生产工艺有一定的参考价值。

A Y-branch structure which introduces input waveguide, slow-broadening waveguide and wide-transiting waveguide is designed to reduce the insertion loss of optical power splitter. It’s gradually extended to a 1×8 planar waveguide optical power splitter by using OptiBPM software. Effects of waveguide refractivity, arcus waveguide length, branching angle and input wavelength on output performance of the planar waveguide optical power splitter are investigated respectively, and it is optimized by combining the optimal structure parameters. Simulation results show that the insertion loss and optimal value of output uniformity of the splitter are 9.96 dB, 0.41 dB, respectively. The design parameters and performances of device can meet the requirements of mass production, which has certain reference value for the design and production process of optical splitter.