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装夹自重变形对大口径绝对面形检测的影响

Influence of the Clamping and Gravity Deformation on Absolute Test of Large Plane

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摘要

针对立式大口径平面干涉仪, 采用结合Zernike多项式的三平面互检面形检测方法, 研究参考平面在装夹情况下的自重变形对绝对面形检测结果的影响.运用ANSYS有限元分析方法研究了不同参数下的装夹和自重变形情况, 得到了最优的装夹参数为环带宽度15 mm、平面厚度90 mm, 此时的变形量峰谷值为0.023λ(λ=632.8 nm).通过参考平面装夹自重变形对测量结果影响的模拟检测试验和对比分析, 发现参考平面装夹自重变形不仅影响其自身的面形, 而且对未变形大口径平面的绝对面形检测结果也有较大影响, 面形残差峰谷值基本都在0.011λ, 尤其在高精度干涉测量中该影响不可忽略.研究结果可为高精度测量的变形补偿提供参考.

Abstract

Aiming at the vertical large plane interferometer, the method of threeflat test with Zernike polynomials was used to study the influence of the clamping and gravity deformation of the large plane on the absolute surface test results. The method of ANSYS finite element analysis was used to simulate the clamping and gravity deformation under different parameters. The clamping parameters of the ring width of 15 mm and the plane thickness of 90 mm are optimized, and the deformation quantity peakvalley value is 0.023λ (λ=632.8 nm). The result of simulation experiment and comparative analysis base on the threeflat test with reference plane deformation show that the clamping and gravity deformation of the large reference plane in the vertical large plane interferometer is not only effects on the reference surface shape of the reference plane itself, but also affects the absolute surface shape of the large plane without deformation, and the surface deviation peakvalley value is basically 0.011λ, so the clamping and gravity deformation influence can′t be ignored. This study will provide references for future research on deformation compensation.v

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中图分类号:TH741

DOI:10.3788/gzxb20184702.0212004

基金项目:科技部国际合作项目(No.2015DFA10360)和总装备部项目(No.JCKY2016208A001)资助

收稿日期:2017-09-04

修改稿日期:2017-10-23

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赵思伟:西安工业大学 光电工程学院, 陕西省薄膜技术与光学检测重点实验室, 西安710021
田爱玲:西安工业大学 光电工程学院, 陕西省薄膜技术与光学检测重点实验室, 西安710021
王大森:中国兵器科学院宁波分院, 浙江 宁波310022
刘丙才:西安工业大学 光电工程学院, 陕西省薄膜技术与光学检测重点实验室, 西安710021
朱学亮:西安工业大学 光电工程学院, 陕西省薄膜技术与光学检测重点实验室, 西安710021
刘卫国:西安工业大学 光电工程学院, 陕西省薄膜技术与光学检测重点实验室, 西安710021

联系人作者:赵思伟(zhaosiwei30@163.com)

备注:赵思伟(1991-), 男, 硕士研究生, 主要研究方向为光学检测技术.

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引用该论文

ZHAO Siwei,TIAN Ailing,WANG Dasen,LIU Bingcai,ZHU Xueliang,LIU Weiguo. Influence of the Clamping and Gravity Deformation on Absolute Test of Large Plane[J]. ACTA PHOTONICA SINICA, 2018, 47(2): 0212004

赵思伟,田爱玲,王大森,刘丙才,朱学亮,刘卫国. 装夹自重变形对大口径绝对面形检测的影响[J]. 光子学报, 2018, 47(2): 0212004

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