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InGaAs探测器的盲元分析及P电极优化

Blind Pixel Analysis of InGaAs Detector and Optimization of P Electrode

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摘要

采用扫描电容显微镜分析了平面型PIN In0.52Al0.48As/In0.53Ga0.47As/ In0.52Al0.48As短波红外探测器盲元产生的原因, 利用半导体器件仿真工具Sentaurus TCAD对探测器中的盲元特性进行了模拟, 并利用制备的Au/P-In0.52Al0.48As传输线结构芯片对P电极的欧姆接触进行优化.研究结果表明, P电极与扩散区外的N--In0.52Al0.48As帽层形成导电通道导致了盲元的产生, 优化后Au与P-In0.52Al0.48As帽层之间具有更低的比接触电阻为3.52×10-4 Ω·cm-2, 同时Au在高温快速热退火过程中的流动被抑制, 从而降低了盲元产生的概率.

Abstract

The blind pixels existing in planner PIN type In0.52Al0.48As/In0.53Ga0.47As/ In0.52Al0.48As short wavelength infrared detector were analyzed with the aid of scanning capacitance microscopy technique. And the simulation of blind pixels by Sentaurus TCAD was also presented. In order to eliminate the blind pixels, the transfer line model chip was fabricated to optimize the ohmic contact of Au electrode on P-In0.52Al0.48As. The result shows that a conductive chanel formed between the P electrode and the N--In0.52Al0.48As cap layer outside the diffusion region resultes in blind pixel generation. Fourthermore, the special contact resistivity which is 3.52×10-4 Ω·cm-2 of Au on P-In0.52Al0.48As was obatined and the problem of Au flowing occurred in rapid thermal processing was suppressed after optimization, so that the probability of blind pixels generation was reduced.

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中图分类号:TN362;TN215

DOI:10.3788/gzxb20184703.0304001

基金项目:国家自然科学基金(No.61505090),南通市科技项目(Nos.GY12015010, GY12016024),南通大学自然科学项目(Nos.14ZY003, 14ZY002, 03080666, 14Z003),江苏省六大人才项目(Nos. 2016-XCL-052, 2013-XCL-013),南通智能信息技术联合研究中心开放课题基金项目(No. KFKT2016A05),江苏省高校自然科学基金 (No. 15KJB150023)和江苏省高等学校自然科学研究重大项目(No.17KJA470007)资助

收稿日期:2017-08-06

修改稿日期:2017-11-28

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作者单位    点击查看

邓洪海:南通大学 电子信息学院, 江苏 南通 226019
杨波:中国科学院上海技术物理研究所 红外成像材料和器件重点实验室, 上海 200083
夏辉:中国科学院上海技术物理研究所 红外成像材料和器件重点实验室, 上海 200083
邵海宝:南通大学 电子信息学院, 江苏 南通 226019
王强:南通大学 电子信息学院, 江苏 南通 226019
王志亮:南通大学 电子信息学院, 江苏 南通 226019
朱友华:南通大学 电子信息学院, 江苏 南通 226019
黄静:南通大学 电子信息学院, 江苏 南通 226019
李雪:中国科学院上海技术物理研究所 红外成像材料和器件重点实验室, 上海 200083
邵秀梅:中国科学院上海技术物理研究所 红外成像材料和器件重点实验室, 上海 200083
龚海梅:中国科学院上海技术物理研究所 红外成像材料和器件重点实验室, 上海 200083

联系人作者:邓洪海(denghonghai@ntu.edu.cn)

备注:邓洪海(1986-), 男, 讲师, 博士, 主要研究方向为红外光电探测器技术.

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引用该论文

DENG Hong-hai,YANG Bo,XIA Hui,SHAO Hai-bao,WANG Qiang,WANG Zhi-liang,ZHU You-hua,HUANG Jing,LI Xue,SHAO Xiu-mei,GONG Hai-mei. Blind Pixel Analysis of InGaAs Detector and Optimization of P Electrode[J]. ACTA PHOTONICA SINICA, 2018, 47(3): 0304001

邓洪海,杨波,夏辉,邵海宝,王强,王志亮,朱友华,黄静,李雪,邵秀梅,龚海梅. InGaAs探测器的盲元分析及P电极优化[J]. 光子学报, 2018, 47(3): 0304001

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