激光与光电子学进展, 2018, 55 (2): 021415, 网络出版: 2018-09-10
飞秒激光微加工制备无衬底太赫兹带通滤波器 下载: 1214次
Substrateless Terahertz Band-Pass Filters Fabricated by Femtosecond Laser Micro-Machining
激光技术 飞秒激光微加工 带通滤波器 太赫兹 时域有限差分法 laser technique femtosecond laser micro-machining band-pass filter terahertz finite difference time domain method
摘要
利用时域有限差分法,仿真设计了三组具有不同中心频率的十字形太赫兹带通滤波器,并搭建了飞秒激光微加工系统,在单层铝箔上实现了无衬底太赫兹滤波器的加工。利用时域太赫兹光谱系统,对所加工的器件进行了透射率测试,实验和仿真结果高度吻合,所加工的太赫兹滤波器中心频率处的透射率为85%以上,达到商业化太赫兹滤波器水平。
Abstract
Three groups of cross-shaped terahertz band-pass filters with different central frequencies are designed by using the finite difference time domain method. A femtosecond laser micro-machining system is built and the substrateless terahertz filter on a single-layered aluminum foil is fabricated. The transmissivities of these band-pass filters are tested by using the time-domain terahertz spectroscopy system. The experimental results are in a good agreement with the simulated results. All the transmissivities at central frequencies of these filters are over 85%, which reaches the commercial level of terahertz filters.
高炳攀, 林炎章, 陈盈, 陈燕青, 王向峰. 飞秒激光微加工制备无衬底太赫兹带通滤波器[J]. 激光与光电子学进展, 2018, 55(2): 021415. Bingpan Gao, Yanzhang Lin, Ying Chen, Yanqing Chen, Xiangfeng Wang. Substrateless Terahertz Band-Pass Filters Fabricated by Femtosecond Laser Micro-Machining[J]. Laser & Optoelectronics Progress, 2018, 55(2): 021415.