针对普通尺蠖式直线微驱动器运动速度低和输出力小等问题, 基于柔顺机构设计了一种新型尺蠖式直线微驱动器。微驱动器由箝位机构、驱动机构和输出轴组成, 其运动特点是驱动机构驱动箝位机构进行往复直线运动, 箝位机构带动输出轴作直线运动。箝位机构和驱动机构均采用柔性杠杆结构, 保证了微驱动器所需的箝位力与驱动力, 并提高了其运动速度。采用伪刚体方法建立了驱动电压与箝位力、驱动机构输入位移与输出位移之间的关系, 根据功能原理建立了输入力与驱动力之间的关系并制作了样机, 搭建了实验测试系统进行性能测试, 测试结果表明, 驱动器最大箝位力为216.43 N, 最大驱动力为13.5 N, 在驱动电压120 V, 频率95 Hz时, 达到最大速度48.91 mm/s。

In consideration of the issues of small output force and low speed of inchworm linear actuator, a novel inchworm linear micro actuator based on compliant mechanism was presented. The micro actuator was composed of two clamping mechanisms, a driving mechanism and an output shaft. The movement was characterized by the drive mechanism, which drives the clamping mechanism to create reciprocating linear motion, and the clamping mechanism, which was driven by linear motion from the output shaft. The flexible lever structure was adopted to design both the clamping mechanism and the driving mechanism in order to offer enough clamping force and driving force and improve the speed of the micro actuator. The relationship between the driving voltage and clamping force of the clamping mechanism, and the relationship between input displacement and output displacement of the driving mechanism were established by the pseudo rigid body method. The relationship between the input force and the driving force was established based on the function principle. The prototype of micro actuator was made and an experimental platform was set up to test the performance of the micro actuator. The experimental results show that, when the driving voltage is 120 V, frequency is 95 Hz, and maximum speed is 48.91 mm/s; the maximum clamping and driving forces are 216.43 N and 13.5 N.