摘要

为了研究三层介质减反射薄膜的散射特性减小光学薄膜的散射损耗，以多层光学薄膜矢量光散射理论为基础，利用光学薄膜的总散射损耗与光学薄膜双向反射分布函数的关系，研究了三层减反射薄膜的散射特性，即三层减反射薄膜随着层数增加双向反射分布函数与散射角的关系，以及入射波长变化对于三层减反射薄膜双向分布反射函数的影响。研究结果表明，在界面微粗糙度相关模型下，三层减反射薄膜在中心波长处，具有减反射和减散射效果,其反射率曲线呈明显的“W”形，反射率的极大值出现在中心波长处，而对于完全非相关模型,镜面反射方向上的双向反射分布函数随着波长的增加呈现出单调减小的趋势。

Abstract

In order to decrease the scattering loss in three layers anti-reflection films, the scattering characteristics is analyzed based on the theory of multilayer optical thin film vector light and using the relationship between the total scattering loss of optical thin film and optical thin film bidirectional reflectance distribution function. The scattering characteristics in this paper reflect the relationship between BRDF and angle of scattering increased with the layers and the effect of incidence wavelength on the BRDF about the three layers anti-reflection films. The results show that the three layers anti-reflection film has the effect on reducing the reflection and scattering at centric wavelength according to model of roughness related, which reflectance curve presents an obvious “W” shape and the maximum reflection appears at the centric wavelength. While according to the completely unrelated model, the BRDF has a monotonical decreasing trend with the increase of wavelength in direction of specular reflection.

补充资料

中图分类号：O484

所属栏目：器材与器件

基金项目：陕西省自然科学基础研究计划项目(2014JM8333)

收稿日期：2017-07-10

修改稿日期：2017-09-17

网络出版日期：--

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联系人作者：联系作者(yangchen2221963a@163.com)

备注：杨琛(1993- )，男，硕士研究生，主要从事薄膜工艺与薄膜检测技术方面的研究工作。

【1】张兴鑫. 基于损耗特性的光学元件表面质量表征研究［D］. 成都： 中国科学院光电技术研究所, 2016.
ZHANG Xing-xin. Study on surface quality of optical components base on optical loss［D］. Chengdu: University of Chinese Academy of Sciences, 2016.

【2】李博, 陈健, 王伟国, 等. 防空反导高能激光武器［J］.中国光学，2012,5(4)：352-357.
LI Bo, CHEN Jian, WANG Wei-guo, et al. High power anti-missile laser weapons for aerial defence［J］.Chinese Optics, 2012, 5(4)：352-357.

【3】徐长山, 巩岩, 襄阳, 等. 表面轮廓仪传递函数对超光滑表面粗糙度测量的影响［J］. 光学精密工程, 2002 10(1): 45-49.
XU Chang-shan, GONG Yan, XIANG Yang, et al. Effects of transfer function of profilometer on roughness measurement of ultra-smooth surface ［J］. Optics and Precision Engineerin, 2002, 10(1): 45-49.

【4】AMRA C. Theory and application of antiscattering single layers: antiscattering antireflection coatings ［J］. Appl. Opt., 1986, 25(16): 2695-2702.

【5】Elson J M. Theory of light scattering from a rough surfaces with an inhomogeneous dielectric permittivity ［J］. Physical review B, 1984, 30(10): 5460-5480.

【6】侯海虹, 范正修, 邵建达, 等. 光学表面的标量散射理论［J］. 激光与光电子学进展, 2005, 42(11): 35-38.
HOU Hai-hong, FAN Zheng-xiu, SHAO Jian-da, et al. Scalar scattering theory of optical surfaces［J］. Laser & Optronics Progress, 2005, 42(11): 35-38.

【7】侯海虹, 沈健, 沈自才, 等. 光学薄膜的分层界面散射模型［J］. 光学学报, 2006, 26(7): 1102-1106.
HOU Hai-hong, SHEN Jian, SHEN Zi-cai, et al. Stratified-interface scattering model for multilayer optical coatings［J］. Acta Optics Sinica, 2006, 26(7): 1102-1106.

【8】潘永强, 吴振森, 杭凌侠. 多层介质高反射膜的散射特性研究［J］. 光电工程, 2008, 35(10): 0012-05.
PAN Yong-qiang, WU zhen-sen, HANG Ling-xia. Light scattering properties of multilayer dielectric high-reflection films［J］. Opto-Electronic Engineering, 2008, 35(10): 0012-05.

【9】潘永强, 吴振森, 杭凌侠. 光学薄膜界面粗糙度互相关特性与光散射［J］. 中国激光, 2008, 35(6): 916-920.
PAN Yong-qiang, WU Zhen-sen, HANG Ling-xia. Optical thin films interfaces roughness cross-correlated properties and light scattering［J］. Chinese Journal of Lasers, 2008, 35(6): 916-920.

【10】潘永强, 陈佳. 光学薄膜减散射特性研究［J］. 红外与激光工程, 2016, 45(1): 0118007-1-0118007-5.
PAN Yong-qiang, CHEN Jia. Anti-scattering properties of optical thin film［J］. Infrared and Laser Engineering, 2016, 45(1): 0118007 -1-0 118007-5.

引用该论文

YANG Chen,PAN Yong-qiang. Light Scattering Properties of Three Layers Broadband Anti-Reflective Films[J]. OPTICS & OPTOELECTRONIC TECHNOLOGY, 2018, 16(1): 11-15

杨 琛,潘永强. 三层宽带减反射膜散射特性研究[J]. 光学与光电技术, 2018, 16(1): 11-15