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TFT-LCD 改善Particle Gap的研究

Prevention of TFT-LCD’s Particle Gap

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摘要

Particle Gap是TFT-LCD制程中常见的一种缺陷。以55 UHD产品为例, Particle Gap发生率约为1.0%, 对产品良率影响较大, 为提升液晶屏品质和客户满意度, 急需改善此不良。文章结合不良现象研究Particle Gap的主要异物模式, 最终通过改善CF研磨失败异物、沙粒状异物和透明状异物这种模式达到整体Particle Gap降低的效果。首先利用流程图分析影响异物模式的关键步骤, 然后通过鱼骨图、决策矩阵、假设检验验证找出影响异物模式的显著因素, 最后通过合力促进法总结出显著因素的最佳改善方案, 导入量产并文件标准化, 可平行推广至55UHD以外的其它尺寸。改善结果表明:通过以上3种异物类型的改善, 55UHD Particle Gap发生率降低至少30%, 为公司带来了巨大且显著的硬性节省。

Abstract

Particle Gap was a common defect in TFT-LCD process. Taking 55 UHD product as an example, the incidence of Particle Gap was about 1.0%, which had great impact on the product yield. To enhance the quality of LCD screen and customer satisfaction, this problem needed to be resolved. In this paper, we analyzed the main types of Particle Gap by the bad phenomena and achieved the effect of reducing the Particle Gap finally by improving the CF grinding failure particle, sandy particle and transparent particle. First, we used the flow chart to analyze the key steps affecting the particle model, and then found out the significant factors through the fish bone map, decision matrix and hypothesis test verification. Finally, we summed up the best improvement program by force promotion method, which was imported into production and standardized. At the same time, above improvement measures could be extended to other size product besides 55UHD.The improved results showed the Particle Gap rate of 55UHD decreased 30% at least, which brought great significant hard savings.

Newport宣传-MKS新实验室计划
补充资料

中图分类号:TN141.9

DOI:10.3788/yjyxs20183302.0129

所属栏目:材料与器件

收稿日期:2017-07-26

修改稿日期:2017-08-22

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作者单位    点击查看

高 欢:合肥鑫晟光电科技有限公司, 安徽 合肥 230012
陈文智:群龙企业咨询(上海)有限公司, 上海 200335
姚 晔:合肥乐凯科技产业有限公司, 安徽 合肥 230041
张南红:合肥鑫晟光电科技有限公司, 安徽 合肥 230012
汤展峰:合肥鑫晟光电科技有限公司, 安徽 合肥 230012
辛志远:合肥鑫晟光电科技有限公司, 安徽 合肥 230012
李 静:合肥鑫晟光电科技有限公司, 安徽 合肥 230012
范恒亮:合肥鑫晟光电科技有限公司, 安徽 合肥 230012
韩君奇:合肥鑫晟光电科技有限公司, 安徽 合肥 230012
尹文祥:合肥鑫晟光电科技有限公司, 安徽 合肥 230012

联系人作者:高欢(gaohuanhf@boe.com.cn)

备注:高欢(1985-), 女, 安徽六安人, 硕士, 高级工程师, 主要从事液晶显示行业中不良分析改善与新产品导入等工作。

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引用该论文

GAO Huan,CHEN Wen-chih,YAO Ye,ZHANG Nan-hong,TANG Zhan-feng,XIN Zhi-yuan,LI Jing,FAN Heng-liang,HAN Jun-qi,YIN Wen-xiang. Prevention of TFT-LCD’s Particle Gap[J]. Chinese Journal of Liquid Crystals and Displays, 2018, 33(2): 129-137

高 欢,陈文智,姚 晔,张南红,汤展峰,辛志远,李 静,范恒亮,韩君奇,尹文祥. TFT-LCD 改善Particle Gap的研究[J]. 液晶与显示, 2018, 33(2): 129-137

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