激光与光电子学进展, 2018, 55 (4): 041401, 网络出版: 2018-09-11   

扩束镜镜间距和倾斜度对激光聚焦特性的影响 下载: 1308次

Influences of Lens Distance and Tilt Angle Between Beam Expanders on Laser Focusing Characteristics
作者单位
华中科技大学武汉光电国家实验室, 湖北 武汉 430074
摘要
离焦量和激光能量的空间分布对激光加工质量有着重要的影响,通过调节扩束镜镜间距来满足不同加工材料对离焦量的不同需求是激光加工中常用的方法。通过使用ZEMAX软件分别在序列模式和非序列模式下对激光加工的光路系统进行建模,其中扩束镜是由双透镜组成的伽利略透射式系统,在仿真环境下测量了扩束镜不同镜间距和倾斜度对应的焦点位置和工作面光斑能量分布情况。结果表明:离焦量与镜间距变化量呈线性关系,离焦量随镜间距变化量的减小而减小;负离焦量随倾斜度的增大而增大。工作面上光斑的峰值功率随着扩束镜镜间距和倾斜度的增大而减小,镜间距改变带来的影响远大于倾斜度的影响。工作面上光斑位置的偏移量与倾斜角呈线性关系。光斑模式始终为基模高斯分布。实验测量了扩束镜不同镜间距下的离焦量和工作面光斑能量分布情况,实验结果与仿真结果较好得吻合。
Abstract
Defocusing amount and spatial distribution of laser energy have a significant effect on the quality of laser processing. It is a commonly used method in laser processing, and the method can adjust the lens distance between beam expanders to meet the different needs of defocusing amounts for the different laser processing materials. We use ZEMAX to model the optical system of laser processing with sequential and non-sequential modes. The beam expander is a Galileo transmission system composed of two lenses. In the simulation environment, the focal position and the spot energy distribution on the working plane are measured at different lens distances and tilt angles. The results show that the defocusing amount is proportional to the variation of lens distance, and the defocusing amount decreases with the decreasing distance. The negative defocusing amount increases with the increasing tilt angle. On the working plane, the peak power of laser spot decreases as the distance between the focal points of two lenses and the tilt angle increase. The effect of lens distance on the laser focusing characteristics is much greater than that of the tilt angle. The displacement of the laser spot is proportional to the tilt angle. The laser spot mode is always base-mode Gauss distribution. Finally, the defocusing amount and the spot energy distribution at different lens distances are measured. The experimental results are in good agreement with the simulation results.

杨亮亮, 张珞, 朱海红, 殷杰, 柯林达, 曾晓雁. 扩束镜镜间距和倾斜度对激光聚焦特性的影响[J]. 激光与光电子学进展, 2018, 55(4): 041401. Liangliang Yang, Luo Zhang, Haihong Zhu, Jie Yin, Linda Ke, Xiaoyan Zeng. Influences of Lens Distance and Tilt Angle Between Beam Expanders on Laser Focusing Characteristics[J]. Laser & Optoelectronics Progress, 2018, 55(4): 041401.

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