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太赫兹波段金属阵列结构的透射及反射宽谱偏振特性

Broad-Band Polarization Characteristics on Transmission and Reflection of Metal Array Structures in Terahertz Region

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摘要

基于计算机仿真技术(CST)软件对二维金属光栅阵列在0.1~10 THz波段的偏振特性进行了数值分析,利用光刻和金属薄膜工艺在500 μm厚的高阻硅衬底上沉积了20 nm厚的不同结构周期的金属铜光栅阵列,利用傅里叶变换光谱仪测量了该光栅阵列的透射及反射特性。结果表明:在太赫兹宽谱范围内,该光栅阵列的透射和反射都具有良好的偏振特性,且偏振特性范围可通过调整结构周期进行调节;该研究对太赫兹偏振器的进一步研究及应用提供了参考。

Abstract

On the basis of computer simulation technology (CST) software,the polarization characteristics of two-dimensional metal grating arrays in 0.1-10 THz region are numerically analyzed. Different periodic metal copper grating arrays with 20 nm thickness deposited on 500 μm thick high-resistance silicon substrate are experimentally prepared by photo-lithography and thin-film technology. Then, the transmission and reflection characteristics of the structure are measured by Fourier transform spectrometer. Results show that the grating arrays have good polarization characteristics of the transmission and reflection in terahertz broad-band,and the polarization range can be adjusted by the structural period. Our results provide a reference for the further study and application of THz polarizer.

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中图分类号:O436

DOI:10.3788/AOS201838.0513001

所属栏目:集成光学

基金项目:国家自然科学基金(61405087)、上海市科技创新行动计划(15DZ0500103)、上海市自然科学基金(17ZR1448300)

收稿日期:2017-09-30

修改稿日期:2017-11-28

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作者单位    点击查看

沈云:南昌大学物理学系, 江西 南昌 330031
汪涛:南昌大学物理学系, 江西 南昌 330031
汪云:南昌大学空间科学与技术研究院, 江西 南昌 330031
邓晓华:南昌大学空间科学与技术研究院, 江西 南昌 330031
曹俊诚:中国科学院上海微系统与信息技术研究所中国科学院太赫兹固态技术重点实验室, 上海 200050
谭智勇:中国科学院上海微系统与信息技术研究所中国科学院太赫兹固态技术重点实验室, 上海 200050
邹林儿:南昌大学物理学系, 江西 南昌 330031
代国红:南昌大学物理学系, 江西 南昌 330031

联系人作者:邓晓华(Dengxiaohua0@gmail.com)

备注:沈云(1980-),男,博士,副教授,硕士生导师,主要从事THz器件及电磁特性方面的研究。E-mail: shenyun@ncu.edu.cn

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引用该论文

Shen Yun,Wang Tao,Wang Yun,Deng Xiaohua,Cao Juncheng,Tan Zhiyong,Zou Lin′er,Dai Guohong. Broad-Band Polarization Characteristics on Transmission and Reflection of Metal Array Structures in Terahertz Region[J]. Acta Optica Sinica, 2018, 38(5): 0513001

沈云,汪涛,汪云,邓晓华,曹俊诚,谭智勇,邹林儿,代国红. 太赫兹波段金属阵列结构的透射及反射宽谱偏振特性[J]. 光学学报, 2018, 38(5): 0513001

被引情况

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【2】张欣欣,何明霞,赵晋武,陈勰宇,刘立媛,卢晓云,田甜,陈孟秋,王璞. 0.1 THz辐射对大鼠海马神经元兴奋性的影响. 中国激光, 2020, 47(2): 207023--1

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